Patents Represented by Attorney GrayRobnson, P.A.

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  • Faceted mirror apparatus
    Patent number: 7802891
    Abstract: A faceted mirror apparatus includes a support plate having a plurality of stepped reception bores into which are fitted the base portions of respective ones of a plurality of mirror facets having mirrored surfaces. An outer surface of each of the facets bears on an inner wall to provide a stable alignment of the optical axes of the mirrored surfaces such that the apparatus generates a beam of rays from impinging rays.
    Type: Grant
    Filed: December 18, 2008
    Date of Patent: September 28, 2010
    Assignee: Carl Zeiss SMT AG
    Inventors: Andreas Seifert, Markus Weiss, Andreas Heisler, Stefan Dornheim