Patents Represented by Attorney, Agent or Law Firm Gregory P. Mayback
  • Plant for producing semiconductor products
    Patent number: 6623231
    Abstract: A plant for producing semiconductor products is described and has a plurality of production and measuring units in at least one clean room. Provided there is a configuration of processing stations, which has at least one production unit or measuring unit, a production buffer disposed at the latter for the deposition of semiconductor products and a handling device for the automatic delivery and outward transport of the semiconductor products. The processing stations are interconnected via a conveyor system.
    Type: Grant
    Filed: September 25, 2001
    Date of Patent: September 23, 2003
    Assignee: Infineon Technologies AG
    Inventor: Jürgen Elger