Abstract: A mask forming method forms an A mask forming functional layer with an amorphous structure so as to cover an etched body, forms a B mask forming functional layer so as to cover the formed A mask forming functional layer, forms a convex/concave pattern in the formed B mask forming functional layer by carrying out a predetermined process to form a B mask on the A mask forming functional layer, and forms an A mask on the etched body by forming a convex/concave pattern in the A mask forming functional layer by dry etching the A mask forming functional layer using the B mask. By doing so, a convex/concave pattern with extremely small pattern fluctuations can be formed in the A mask forming functional layer.
Abstract: A method of forming airgaps is provided where a blocking mask is applied to a substrate to shield a portion of the substrate from a beam of energy. After irradiation, the blocking mask is removed and a capping material is applied to the substrate. Alternatively, the capping material may be applied before irradiation. The capping material is perforated to allow an etchant to pass therethrough to the substrate below the capping material. The exposed portions of the substrate are removed from underneath the capping material by etching. The capping material is then sealed leaving sealed airgaps within the substrate.
Type:
Grant
Filed:
February 11, 2005
Date of Patent:
May 12, 2009
Assignee:
International Business Machines Corporation
Inventors:
Christos D. Dimitrakopoulos, Daniel C. Edelstein, Vincent J. McGahay, Satyanarayana V. Nittta, Kevin S. Petrarca, Shom Ponoth, Shahab Siddiqui
Abstract: Machine for the selective harvest of berries, for example, machine for gathering grapes, of the type having a shaking system constituted by two berry picking assemblies each having a plurality of superposed gathering arms, characterized in that said shaking system is coupled to at least one driving electro-hydraulic device including at least one hydraulic jack controlled by a servovalve or by a proportional solenoid valve controlled by a microprocessor electronic control unit.
Abstract: A fast aspherical zoom lens system includes a positive first lens group, a negative second lens group, a negative third lens group, and a positive fourth lens group, arranged in this order from the object side. The lens system includes at least one aspherical surface. When the zooming operation is carried out, the second and third lens groups are moved. The aspherical surface is located at a position in which the following condition is satisfied:H.sub.ASP /H.sub.MAX <0.35,wherein H.sub.MAX represents the height of the paraxial ray furthest from the optical axis at the long focal length extremity for all the lens surfaces, and H.sub.ASP represents the height of the paraxial ray to the aspherical surface at the long focal length extremity.