Patents Represented by Attorney Greogry G. Hendricks

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  • Titanium nitride as one layer of a multi-layered coating intended to be etched
    Patent number: 4226932
    Abstract: A multilayered thin film structure comprising layers of resistive and conductive materials on a substrate, said layers including tantalum nitride, palladium and gold. A layer of titanium nitride, is used between the tantalum nitride and palladium layers to act as an adhesive layer, to prevent undercutting during etching, and to allow all metal depositing to be performed during one step.
    Type: Grant
    Filed: July 5, 1979
    Date of Patent: October 7, 1980
    Assignee: GTE Automatic Electric Laboratories Incorporated
    Inventor: Giampiero Ferraris