Patents Represented by Attorney, Agent or Law Firm H. Donaldson Nelson
  • Method to accurately determine classification codes for defects during semiconductor manufacturing
    Patent number: 6185511
    Abstract: A method of determining classification codes for defects occurring in semiconductor processes comparing images of defects from a first selected wafer with images of defects in a first image reference library. The images in the first image reference library are updated from a master image reference library. The images in the master image reference library are the best images of defect types. The images in the master image reference library are in a format readable by all review stations utilized to review the images of the defect.
    Type: Grant
    Filed: November 28, 1997
    Date of Patent: February 6, 2001
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Paul J. Steffan, Ming Chun Chen