Patents Represented by Attorney Hoffman Warnick LLP

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  • Automated dynamic metrology sampling system and method for process control
    Patent number: 7487054
    Abstract: A system and method for optimizing and implementing a metrology sampling plan. A system is provided that includes a system for collecting historical metrology data from a metrology tool; and a reduction analysis system that compares an initial capability calculated from the historical metrology data with a recalculated capability for a reduced data set, wherein the reduced data set is obtained by removing a subset of data from the historical metrology data.
    Type: Grant
    Filed: May 11, 2005
    Date of Patent: February 3, 2009
    Assignee: International Business Machines Corporation
    Inventors: Javier A. Ayala, Marc J. Postiglione, Eric P. Solecky