Abstract: A semiconductor fabrication method involving the use of eSiGe is disclosed. The eSiGe approach is useful for applying the desired stresses to the channel region of a field effect transistor, but also can introduce complications into the semiconductor fabrication process. Embodiments of the present invention disclose a two-step fabrication process in which a first layer of eSiGe is applied using a low hydrogen flow rate, and a second eSiGe layer is applied using a higher hydrogen flow rate. This method provides a way to balance the tradeoff of morphology, and fill consistency when using eSiGe. Embodiments of the present invention promote a pinned morphology, which reduces device sensitivity to epitaxial thickness, while also providing a more consistent fill volume, amongst various device widths, thereby providing a more consistent eSiGe semiconductor fabrication process.

Abstract: A semiconductor test structure includes a PFET transistor, having a source region, a drain region, a gate disposed between the source region and the drain region, a body disposed under the gate, and a body contact. The source region and drain region float, and the body contact is electrically connected to the body of the PFET transistor and to the ground. This grounds the body of the PFET transistor, and the body contact of the test structure is electrically connected to a capacitor that is electrically connected to ground.