Abstract: Custom connections between pairs of copper wires in a last damascene wiring level are effected by creating openings in an overlying insulating layer which span a distance between portions of the two wires, then filling the openings with aluminum. The openings can be created (or completed) by a second, maskless UV laser exposure of positive photoresist which is used for patterning the insulating layer. If an opening is not created, an aluminum connecting shape overlying the insulating layer will not effect a connection between the two wires. Similar results can be achieved by laser exposure of a resist used to pattern the aluminum layer, thereby causing breaks in connecting shape when it is desired not to have a connection.

Abstract: Novel interconnect structures possessing a dense OSG material for 90 nm and beyond BEOL technologies in which a low power density oxygen-based de-fluorination plasma process is utilized to increase NBLoK selectivity are presented. These BEOL interconnect structures are capable of delivering enhanced reliability and performance due to the reduced risk of Cu exposure and hence electromigration and stress migration related failures. The oxygen based de-fluorination process is such that the plasma conditions employed {low power density (<0.3 Wcm?2); relatively high pressure (>100 mT); negligible ion current to wafer surface (applied source frequency only)} facilitate a physical expulsion of residual fluorine present on the chamber walls, wafer surface, and within the via structure; thus, minimizing the extent of NBLoK etching that can occur subsequent to removing polymeric byproducts of via etching.

Abstract: A method of performing latch up check on an integrated circuit (IC) design that comprises rasterizing a conductor region shape and contact shapes and iteratively expanding the contact shapes within the conductor region shape using a cellular algorithm. Direction values for contact cells can be used to limit the number of neighboring cells which must be explored. In every fourth iteration of the expansion process, corner cells may not be expanded. Reachable areas outside of conductors can also be explored.

Abstract: A chemical mechanical polishing (CMP) step is used to remove excess conductive material (e.g., Cu) overlying a low-k or ultralow-k interlevel dielectric layer (ILD) layer having trenches filled with conductive material, for a damascene interconnect structure. A reactive ion etch (RIE) or a Gas Cluster Ion Beam (GCIB) process is used to remove a portion of a liner which is atop a hard mask. A wet etch step is used to remove an oxide portion of the hard mask overlying the ILD, followed by a final touch-up Cu CMP (CMP) step which chops the protruding Cu patterns off and lands on the SiCOH hard mask. In this manner, processes used to remove excess conductive material substantially do not affect the portion of the hard mask overlying the interlevel dielectric layer.

Abstract: An apparatus and method for pumping a constant volume of powder to a powder spray gun includes a powder pump which meters the powder into a stream of air so that a constant volume of the air entrained powder is distributed to the spray gun. The invention also discloses a pressure equalizing system that prevents powder leakage across a powder metering system that meters powder from a reservoir into an outlet tube carrying the constant velocity stream of air. A control system is disclosed which adjusts the rate at which powder is metered into the outlet tube so that the mass flow of powder exiting the outlet tube remains constant.

Abstract: Methods and apparatus are disclosed for spraying powder into the interior of welded hollow can bodies from a spray gun mounted to the welding arm of a can forming machine. The spray gun can either apply a stripe of highly charged powder on the welded seam areas of hollow can bodies, or can simultaneously apply a coating of powder having a first thickness on the longitudinally welded seam areas and a second thickness less than the first thickness on the remainder of the interior surface. Air is vented off from the powder flow being transported through the welding arm so that the powder to air ratio is increased. Air is introduced at the downstream end of the welding arm to provide a suction force to help draw the powder flow through the welding arm and to increase the velocity of the powder flow for better tribo charging of the powder in the gun and to improve spray pattern stability.

Abstract: A rotary atomizer has an internal power supply in the atomizer housing about which is passed cooling air. The air then flows out of the atomizer housing in a twisting direction as vectored air in the same direction of rotation as the atomizer head to eliminate any vacuum condition around the atomizer head and to provide shaping control of the coating being sprayed. Exhaust air from an air turbine motor driving the atomizer head is directed around the outside surface of the atomizer housing to prevent the liquid coating from wrapping back and accumulating onto the atomizer housing. A speed sensing system is mounted in the atomizer housing and utilizes both magnetics and optics for accurately measuring the rotational speed of the air turbine motor in the presence of high electrostatic charge and RF fields from the internal power supply. The power supply is disposed within the atomizer housing about the turbine motor.

Abstract: According to the invention, a system and method for controlling air flow through the interior of a powder spray booth includes a powder collection system for collecting oversprayed powder from the interior of the spray booth. The powder collection system includes a powder collector with a powder collection chamber, a pulse plenum chamber, and a fan plenum chamber containing a motor driven fan for drawing the air-entrained powder into the fan plenum chamber so that the oversprayed powder is collected on the cartridge filters and filtered air is exhausted from the fan plenum chamber through one or more final filters. A control system automatically adjusts the speed of the motor driven fan in response to pressure changes in the pulse plenum chamber and the fan exhaust chamber so that a substantially constant air flow is maintained through the powder collector.