Patents Represented by Attorney, Agent or Law Firm Howrd J. Walter, Esq.
  • Patent number: 6225158
    Abstract: A trench storage dynamic random access memory cell with vertical transfer device can be formed in a wafer having prepared shallow trench isolation. Vertical transfer device is built as the deep trenches are formed. Using square printing to form shallow trench isolation and deep trenches, allows for scaling of the cell to very small dimensions.
    Type: Grant
    Filed: May 28, 1998
    Date of Patent: May 1, 2001
    Assignee: International Business Machines Corporation
    Inventors: Toshiharu Furukawa, Mark C. Hakey, David V. Horak, William H. Ma, Jack A. Mandelman