Patents Represented by Attorney, Agent or Law Firm Howrey Williams LLP
  • Thermosetting anti-reflective coatings comprising aryl urethanes of hydroxypropyl cellulose
    Patent number: 6576408
    Abstract: New polymers and anti-reflective compositions including those polymers are provided. The polymer comprises recurring monomers according to the formula wherein each R is —OH, —CH2OH, —O—R1—O—X, or —CH2—O—R1—O—X, each R1 is a branched or unbranched alkyl group, and each X is shown below. The inventive compositions can be used to form anti-reflective coatings having high etch rate and optical densities.
    Type: Grant
    Filed: March 2, 2001
    Date of Patent: June 10, 2003
    Assignee: Brewer Science, Inc.
    Inventors: James D. Meador, Mandar R. Bhave