Patents Represented by Attorney, Agent or Law Firm I. Zborowsky
  • Patent number: 6753963
    Abstract: A method of calibrating magnification of optical devices includes providing a mask with a predetermined pattern, projecting radiation through the mask so as to form a pattern image, and comparing a pattern of the image with a pattern of the mask to determine deviations of the image of the projected image from the image of the mask.
    Type: Grant
    Filed: October 26, 2000
    Date of Patent: June 22, 2004
    Assignee: General Phosphorix
    Inventors: Albert Sicignano, Tim Goldburt