Abstract: In a plasma processing system, a method for dynamically establishing a baseline is provided. The method includes processing a first substrate. The method also includes collecting a first signal data for the first substrate. The method further includes comparing the first signal data against the baseline. The method moreover includes including the first signal data in a recalculation of the baseline if the first signal data is within a confidence level range, which is in between a top level above the baseline and a bottom level below the baseline.
Type:
Grant
Filed:
September 28, 2006
Date of Patent:
March 1, 2011
Assignee:
Lam Research Corporation
Inventors:
Chung-Ho Huang, Jackie Seto, Nicolas Bright
Abstract: A method of fabricating a vertical structure opto-electronic device includes fabricating a plurality of vertical structure opto-electronic devices on a crystal substrate, and then removing the substrate using a laser lift-off process. The method then fabricates a metal support structure in place of the substrate. In one aspect, the step of fabricating a metal support structure in place of the substrate includes the step of plating the metal support structure using at least one of electroplating and electro-less plating. In one aspect, the vertical structure is a GaN-based vertical structure, the crystal substrate includes sapphire and the metal support structure includes copper. Advantages of the invention include fabricating vertical structure LEDs suitable for mass production with high reliability and high yield.
Abstract: To release a spring clip holding a protruding detent in a leg supporting an overhead canopy, a finger-operated push button is actuated from a clearance position and is forced against the detent causing it to withdraw within the leg, and the canopy slidably releases along the leg without injury to the out-of-the-way actuating fingers.
Abstract: A tent (10) with tendable windows (14) having a main structure (12) including a plurality of walls (16,18,20) which are oriented at a first angle (60) with respect to a vertical reference. The tent (10) also includes at least one window (14) which is extendable to a second angle (62) with respect to a vertical reference, where the second angle (62) is a more negative angle than the first angle (60) thus producing windows (14) which are horizontally extendable further than the tent walls (16,18,20).