Abstract: A plurality of multilayer glass-ceramic substrates are arranged in coplanar relationship in a tile pattern within a support platform. The glass-ceramic substrates and the support platform are both formed of materials having thermal expansion characteristics substantially equal to that of a wafer which is supported by the coplanarly aligned substrates during test and burn-in of the wafer. The present invention effectively solves the problem of providing a single large support member for wafer test and burn-in, which heretofore have been limited in mechanical properties and power capability.
Type:
Grant
Filed:
June 26, 1997
Date of Patent:
February 1, 2000
Assignee:
International Business Machines Corporation
Inventors:
Daniel George Berger, James Noel Humenik, Mark Raymond LaForce, Charles Hampton Perry