Patents Represented by Attorney James M. Jenkins and Gilcrest Leas
  • Patent number: 6020750
    Abstract: A plurality of multilayer glass-ceramic substrates are arranged in coplanar relationship in a tile pattern within a support platform. The glass-ceramic substrates and the support platform are both formed of materials having thermal expansion characteristics substantially equal to that of a wafer which is supported by the coplanarly aligned substrates during test and burn-in of the wafer. The present invention effectively solves the problem of providing a single large support member for wafer test and burn-in, which heretofore have been limited in mechanical properties and power capability.
    Type: Grant
    Filed: June 26, 1997
    Date of Patent: February 1, 2000
    Assignee: International Business Machines Corporation
    Inventors: Daniel George Berger, James Noel Humenik, Mark Raymond LaForce, Charles Hampton Perry