Abstract: Two or more defect maps may be provided for the same sample surface at different detection sensitivities and/or processing thresholds. The defect maps may then be compared for better characterization of the anomalies as scratches, area anomalies or point anomalies. This can be done without concealing the more significant and larger size defects amongst numerous small and immaterial defects. One or more defect maps can be used to report the anomalies with classified information; the results from this map(s) can be used to monitor the process conditions to obtain better yield.

Abstract: An anti-reflective coating having a composite layer of silicon nitride and silicon dioxide may be formed over the entire photosensitive region of the photodetector to minimize the amount of reflection. The composite layer comprises a silicon nitride layer and a dielectric layer contiguous to the silicon nitride layer. The anti-reflective coating may be formed in a CMOS process for fabricating the PN junction in the photodiode and CMOS devices for amplifying the photodetector signal, where the polysilicon gate layer is used as a etch stop. The P+ or N+ material in the PN junction of the photodiode has a distributed design where two portions of the region are separated by a distance in the range of Xd to 2Xd, where Xd is the one-sided junction depletion width, to enhance the electric field and to reduce the distance traveled by the carriers for enhancing bandwidth. A heavily doped region of the opposite type may be added between the two portions to further enhance the electric field.

Abstract: Scattered radiation from a sample surface is collected by means of a collector that collects radiation substantially symmetrically about a line normal to the surface. The collected radiation is directed to channels at different azimuthal angles so that information related to relative azimuthal positions of the collected scattered radiation about the line is preserved. The collected radiation is converted into respective signals representative of radiation scattered at different azimuthal angles about the line. The presence and/or characteristics of anomalies are determined from the signals. Alternatively, the radiation collected by the collector may be filtered by means of a spatial filter having an annular gap of an angle related to the angular separation of expected pattern scattering. Signals obtained from the narrow and wide collection channels may be compared to distinguish between micro-scratches and particles.

Abstract: A profiler or scanning probe microscope may be scanned across a sample surface with a distance between them controlled to allow the sensing tip to contact the surface intermittently in order to find and measure features of interest. The distance is controlled so that when the sensing tip is raised or lowered to touch the sample surface, there is no lateral relative motion between the tip and the sample. This prevents tip damage. Prior knowledge of the height distribution of the sample surface may be provided or measured and used for positioning the sensing tip initially or in controlling the separation to avoid lateral contact between the tip and the sample. The process may also be performed in two parts: a fast find mode to find the features and a subsequent measurement mode to measure the features. A quick step mode may also be performed by choosing steps of lateral relative motion to be smaller than 100 nanometers to reduce probability of tip damage.

Abstract: Sputtering of the cathodes of a cold cathode fluorescent lamp is reduced or eliminated by removing electrodes altogether from the sealed envelope containing the gaseous medium. Electric field is then applied by means of electrically conductive members outside the tube. Alternatively, the current passing between electrodes can be spread over multiple sub-electrodes so that the current flow and sputtering experienced by each individual sub-electrode will be reduced. Different designs are employed to facilitate heat dissipation for high power and high intensity cold cathode fluorescent lamp applications. Thus, a container for the fluorescent lamp tube may be omitted altogether and adjacent rounds of a spiral-shaped lamp may be attached together by an adhesive material. Alternatively, the container may be open at one end to facilitate heat dissipation. Or the container for the lamp and the housing from the driver may each contain a hole to allow air circulation to carry away heat.

Abstract: A structure and method are provided to improve stability of a multi-window dense wavelength division multiplexers and to provide polarization-independent multi-window dense wavelength division multiplexers. In one embodiment, the coupler region of a multi-window wavelength division multiplexer (MWDM) is hermetically sealed in a protective casing to prevent moisture from affecting the passband wavelength drifting in the coupler. In one embodiment, the coupler is elastically twisted at the fused fiber portion to reach polarization cancellation. In another embodiment, the coupling region of the coupler is exposed to UV-radiation for passband wavelength adjustment. In yet another embodiment, a passive thermal compensation technique is used to minimize the thermal effect on the passband wavelengths for dense WDM applications. In a further embodiment, the coupler is mounted on the substrate using soft adhesives in conjunction with rigid adhesives, to improve mechanical shock protection.

Abstract: A low phase noise voltage-controlled oscillator (VCO) and method are provided. The VCO comprises a negative resistance generator and a resonator that reduces VCO phase noise.

Abstract: Before the diffraction from a diffracting structure on a semiconductor wafer is measured, where necessary, the film thickness and index of refraction of the films underneath the structure are first measured using spectroscopic reflectometry or spectroscopic ellipsometry. A rigorous model is then used to calculate intensity or ellipsometric signatures of the diffracting structure. The diffracting structure is then measured using a spectroscopic scatterometer using polarized and broadband radiation to obtain an intensity or ellipsometric signature of the diffracting structure. Such signature is then matched with the signatures in the database to determine the grating shape parameters of the structure.

Abstract: A variable attenuator employs a shutter element that is inserted into the path of a beam of radiation. The shutter element comprises a transparent substrate with an opaque layer formed on top of the substrate. The opaque layer forms a pattern in the shape of dots on one part of the substrate and in the shape of a solid layer with holes therein on another part of the substrate. The pattern of holes and dots are such that the radiation transmission function of the element varies as a smooth linear function with the length of the shutter element. Therefore, by inserting the shutter element in a direction along its length into the path of the radiation beam, the amount of attenuation of the beam can be accurately controlled.

Abstract: A digital to analog converter (DAC) has an adjustable dynamic range. Specifically, the adjustable DAC has a control port that receives a control signal indicative of the dynamic range, and the DAC produces an analog signal of the specified dynamic range in response to a corresponding digital signal. In one embodiment, the adjustable DAC includes a bitstream generator that repeatedly generates a bitstream and a low pass filter that receives and filters the repeated bitstream. The bitstream generator is adjustable, and can produce bitstreams of different lengths, depending on the control signal. Increasing the bitstream length results in a greater dynamic range of the analog signal, and vice versa. A user can use a preexisting filter to perform the low pass filtering, by simply selecting a value of the control signal.

Abstract: A light transmitting container is used to house a cold cathode fluorescent lamp (CCFL) to reduce heat loss and to increase the luminous efficiency of the lamp. An electrical connector configuration is connected to an electrode of the lamp and adapted to be electrically and mechanically connected to a conventional electrical socket. A driver circuit in the container converts 50 or 60 Hz power to the high frequency power suitable for operating the CCFL. At least one of the electrodes of the CCFL is outside of the container to facilitate heat dissipation. A two-dimensional array of CCFLs may be held by a module housing to form a display for displaying still or moving images and characters. The above-described CCFL configurations may also be used for displaying traffic information.

Abstract: An anti-reflective coating having a composite layer of silicon nitride and silicon dioxide may be formed over the entire photosensitive region of the photodetector to minimize the amount of reflection. The composite layer comprises a silicon nitride layer and a dielectric layer contiguous to the silicon nitride layer. The anti-reflective coating may be formed in a CMOS process for fabricating the PN junction in the photodiode and CMOS devices for amplifying the photodetector signal, where the polysilicon gate layer is used as a etch stop. The P+ or N+ material in the PN junction of the photodiode has a distributed design where two portions of the region are separated by a distance in the range of Xd to 2Xd, where Xd is the one-sided junction depletion width, to enhance the electric field and to reduce the distance traveled by the carriers for enhancing bandwidth. A heavily doped region of the opposite type may be added between the two portions to further enhance the electric field.

Abstract: A curved mirrored surface is used to collect radiation scattered by a sample surface and originating from a normal illumination beam and an oblique illumination beam. The collected radiation is focused to a detector. Scattered radiation originating from the normal and oblique illumination beams may be distinguished by employing radiation at two different wavelengths, by intentionally introducing an offset between the spots illuminated by the two beams or by switching the normal and oblique illumination beams on and off alternately. Beam position error caused by change in sample height may be corrected by detecting specular reflection of an oblique illumination beam and changing the direction of illumination in response thereto. Butterfly-shaped spatial filters may be used in conjunction with curved mirror radiation collectors to restrict detection to certain azimuthal angles.

Abstract: A phase locked loop is employed to provide a clock signal for controlling the reading or writing of audio data from or into a memory to avoid memory overflow and underrun. The difference between the write and read pointers is monitored and used for adjusting a divider counter used in the feedback loop of the phase locked loop, by incrementing, decrementing by one or leaving unchanged the value of the counter. The counter is used to divide the output of the phase locked loop to provide a reference signal to the phase locked loop. A reference frequency for reading the audio data may be set close to the writing speed by incrementing or decrementing the reading speed by fine adjustment steps until the reference frequency is reached. After the reference frequency is reached, the reading speed is changed between the reference frequency and a frequency one fine adjustment step away from the reference frequency so that the average reading speed is equal to the writing speed.

Abstract: An ion beam supplied from a source is modulated so that ions at a constant flux is passed during on periods or portions thereof and are deflected or stopped during off periods according to a binary sequence in order to encode the ion beam with phase information of the sequence. The binary sequence is such that ions released during two consecutive on periods overlap before reaching a detector, thereby increasing the duty-cycle. The detector output signal is demodulated using the phase information of the binary sequence to recover an ion mass spectrum.

Abstract: A new flat cell battery design is provided which incorporates a cathode and an anode terminal which are located in respective corners of a battery body. By locating the cathode and anode terminals in respective corners of the flat cell battery, the storage capacity and energy density of the battery are increased compared to conventional flat cell batteries. The corner terminal design of the present invention significantly improves packaging efficiency over common-edge terminals. In addition to increased volume efficiency, corner terminals improve thermal and electrical distribution properties of the battery. Physical separation of the terminals to adjacent or opposite corners also reduces the probability of inadvertent external short-circuit, resulting in improved safety.

Abstract: A terminal for a battery assembly is adapted to lose electrical conduct with a battery cell in the presence of gases within a battery chamber thereby disabling the battery. The disabling of the battery assembly gives the user an indication that the battery is defective and should not be recharged. Additionally, because the battery is disabled, no more gases will be formed in the battery assembly so the seal or the protective envelope will not burst exposing the battery cell to the environment.

Abstract: A terminal for a battery assembly is adapted to lose electrical conduct with a battery cell in the presence of gases within a battery chamber thereby disabling the battery. The disabling of the battery assembly gives the user an indication that the battery is defective and should not be recharged. Additionally, because the battery is disabled, no more gases will be formed in the battery assembly so the seal or the protective envelope will not burst exposing the battery cell to the environment.

Abstract: The copy holder described is particularly suitable for use in information entry by means of a keyboard and computer monitor. The copy holder is of simple design and includes a clip, a connecting rod and two rod stands for connecting the rod to supporting surfaces. The rod stands are provided with foam rubber. This copy holder is compact, convenient for the user, and easy to manufacture.

Abstract: An improved shading correction system is disclosed where the light intensity variations of the light sources are sensed and are fed back to the shading correction system for improved shading correction. Such feedback action may be applied both during the recording of shading profile reference values when a reference target is scanned and for shading correction when the actual target is scanned.