Patents Represented by Attorney Janik Marcovici

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  • Semiconductor manufacturing process modules
    Patent number: 8313277
    Abstract: A variety of process modules are described for use in semiconductor manufacturing processes.
    Type: Grant
    Filed: October 23, 2007
    Date of Patent: November 20, 2012
    Assignee: Brooks Automation, Inc.
    Inventors: Peter van der Meulen, Christopher C Kiley, Patrick D. Pannese
  • Fast swap dual substrate transport for load lock
    Patent number: 8231322
    Abstract: A load lock is provided for a semiconductor substrate processing system having a transport robot mounted therein. The load lock transport supplies substrates directly to a processing chamber without the need for a central transport robot. The load lock transport is a dual element robot designed for minimum clearance and space and operates within a matching load lock chamber of minimum volume.
    Type: Grant
    Filed: April 18, 2008
    Date of Patent: July 31, 2012
    Assignee: Brooks Automation, Inc.
    Inventor: Mark A. Talmer