Patents Represented by Attorney Jaquelin Spong

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  • MEMS teeter-totter apparatus with curved beam and method of manufacture
    Patent number: 7210352
    Abstract: A teeter-totter apparatus uses a curved beam to generate a differential output which may be indicative of an acceleration applied to the apparatus. The curved-beam teeter-totter apparatus can be combined with an x-axis and y-axis accelerometer, to produce a tri-axis accelerometer which is sensitive to an acceleration applied in any direction. Damping plates may be added to the accelerometers to reduce unwanted motion.
    Type: Grant
    Filed: June 14, 2005
    Date of Patent: May 1, 2007
    Assignee: Innovative Micro Technology
    Inventors: John S. Foster, Paul J. Rubel