Patents Represented by Attorney Jessie L. Abzug
  • Patent number: 4583488
    Abstract: Apparatus in a vacuum deposition system positions a workpiece holder in substantial alignment with a source of material to be deposited onto a work piece affixed to the workpiece holder. The apparatus also rotates the workpiece holder about the deposition source and linearly drives the workpiece holder to varying distances from the deposition source. The apparatus used to drive the workpiece holder is sealably mounted atop an opening in the vacuum chamber. The apparatus enables multiple source depositions to be carried out consecutively without accessing the vacuum chamber. By aligning the workpiece holder over the deposition source, nonuniform deposition onto the workpiece is substantially eliminated.
    Type: Grant
    Filed: March 23, 1984
    Date of Patent: April 22, 1986
    Assignee: International Business Machines Corporation
    Inventors: William W. Brown, Jr., Wayne J. Curry, Gerhard P. Dahlke, Francis T. Lupul, Paul A. Totta