Abstract: A optical assembly (10) for directing and/or focusing a beam of light energy (11) for an exposure apparatus (28) is provided herein. The optical assembly (10) includes one or more optical sections (12) which are assembled together. At least one of the optical sections (12) includes an optical housing (14) having an inner wall (15) which defines a optical chamber (16). One or more optical elements (18) can be secured to the optical housing (14) of each optical section (12). Additionally, each optical section (12) can include a plurality of outlet ports (20) and a plurality of inlet ports (22) for purging the optical chamber (16). The inlet ports (22) and the outlet ports (20) are uniquely positioned to minimize the time required to purge the optical assembly (10) and the amount of replacement fluid (24) used to purge the optical assembly (10).

Abstract: A stage assembly (10) for moving and positioning a device (24) includes a stage base (12), a first stage frame (40), and a second stage frame (66). The stage assembly (10) also includes a pair of X movers (82) (84), and a first stage Y mover (86) that precisely move the first stage frame (40) relative to the stage base (12). Uniquely, the first stage frame (40) is guideless along the X axis, along the Y axis and about the Z axis. With this design, movers (82) (84) (86) can precisely control the position of the first stage frame (40) along the X axis, along the Y axis and about the Z axis. Further, current to the X movers (82) (84) is varied according to the position of the second stage frame (66) relative to the first stage frame (40). These features allow for more accurate positioning of the device (24) by the stage assembly (10) and better performance of the stage assembly (10).

Abstract: A positioning stage assembly having a coarse stage which includes a planar motor driveable in at least two degrees of freedom, and a fine stage positioned on the coarse stage which is driveable in at least three degrees of freedom with respect to the coarse stage. More preferably, the fine stage is driveable in six degrees of freedom and includes variable reluctance actuators for positioning in three degrees of freedom.

Abstract: A suspension system (18) for suspending a stage (14) spaced apart from a stage base (12) is provided herein. The suspension system (18) includes a plurality of spaced apart suspension assemblies (20). Each suspension assembly (20) includes a fluid pad (22) and an adaptable section (24). A bearing fluid (48) is directed from the fluid pad (22) to create a fluid bearing (52) between the fluid pad (22) and the stage base (12). The fluid bearing (52) allows for large displacement, frictionless motion along an X axis, along a Y axis and rotation about a Z axis. The adaptable section (24) secures the fluid pad (22) to the stage (14). The adaptable section (24) allows for relative movement between the fluid pad (22) and the stage (14). More specifically, the adaptable section (24) allows for small displacement, low stiffness motion along the Z axis and rotation about the X axis and the Y axis.

Abstract: A circulating system (10) for cooling a shaft-type linear motor (12) is provided herein. The motor (12) includes a magnet array (22) and a coil assembly (16). The circulating system (10) includes coil housing (36) that encircles the coil assembly (16) and defines a fluid passageway (46) between the coil housing (36) and the coil assembly (16). Fluid (44) from a fluid source (42) is forced through an inlet (38) into the fluid passageway (46). The flow rate of the fluid (44) is controlled to maintain an outer surface (111) of the coil housing (36) at a set temperature to control the effect of the motor (12) on the surrounding environment and the surrounding components.