Patents Represented by Attorney John E. Pillion
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Patent number: 8172923Abstract: An apparatus and method for maintaining low gas velocity variation across a diffuser membrane during the vent-up of a vacuum chamber is disclosed. The diffuser membrane permeability and the pressure conditions across the membrane are chosen to minimize variation in gas flow velocity through the membrane during the vent-up cycle. This reduces re-distribution of particles from a vacuum chamber onto sensitive substrates in the vacuum chamber during vent-up from sub-atmospheric pressure to atmospheric pressure.Type: GrantFiled: January 21, 2009Date of Patent: May 8, 2012Assignee: Entegris, Inc.Inventors: Christopher Vroman, Marshall Randolph
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Patent number: 8091618Abstract: An exchange apparatus comprised of hollow perfluorinated thermoplastic tubes fusion bonded into a perfluorinated thermoplastic material to form unified terminal end blocks is disclosed. The hollow tubes are shaped by plaiting the tubes into cords and thermally annealing the cords to set the bends of the plait. The apparatus can have a housing bonded to the unified terminal end blocks. In use a first fluid enters the hollow tubes at openings in a first unified terminal end block, flows through the lumens of the tubes, and exits the tubes through a second unified terminal end block. A second fluid enters the housing, is separated from the first fluid by the wall of the tubes, and substantially fills the space between the inner wall of the housing and the outer diameters of the hollow tubes. Energy is transferred between the first and second fluids through the tube walls.Type: GrantFiled: October 31, 2007Date of Patent: January 10, 2012Assignee: Entegris, Inc.Inventors: Cha P. Doh, Kwok-Shun Cheng, Alicia Briggs LaForge
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Patent number: 7984526Abstract: The present invention includes methods and materials for making a brush or pad for removing materials, particles, or chemicals from a substrate. The brush or pad includes a rotatable base for supporting a porous pad material. The base include an inner surface and an outer surface and a plurality of channels in the base for interlocking the porous pad material with the base. A porous pad material covers at least a portion of the outer surface of the base and is used for removing material from various substrates. The porous pad material fills one or more of the channels in the base and interlocks the porous pad material with the base. Preferably the channels fluidly connect said inner surface with the outer surface of the base and aid in the alignment of porous pad nodes and the distribution of fluid within the porous pad.Type: GrantFiled: July 13, 2004Date of Patent: July 26, 2011Assignee: Entegris, Inc.Inventor: Briant Enoch Benson
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Patent number: 7963401Abstract: Versions of the invention include compositions and methods for making them that include a polymeric porous membrane with one or more atmospheric pressure microwave plasma modified surfaces. The modified porous membrane is stable, non-dewetting, and retains its mechanical strength.Type: GrantFiled: March 28, 2007Date of Patent: June 21, 2011Assignee: Entegris, Inc.Inventors: Jijun Ge, Alketa Gjoka, Jieh-Hwa Shyu
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Patent number: 7717405Abstract: Disclosed is a shell side contactor which can be used to form ozonated water. The contactor includes a shell and a plurality of porous perfluoroalkoxy resin thermoplastic hollow fibers that are potted at each end of the shell. The perfluoroalkoxy resin hollow fibers can be unskinned, skinned on their inner surface, or skinned on their outer surfaces. The contactor is provided with a spacer that spreads the hollow fibers adjacent an inlet to the shell, thereby permitting liquid flow at desirably high flow rates with acceptable pressure drop through the shell. The mass transfer efficiency of the contactor can be enhanced by jetting water into the fiber bundle and introducing gaps into the bundle.Type: GrantFiled: March 18, 2008Date of Patent: May 18, 2010Assignee: Entegris, Inc.Inventors: Bipin S. Parekh, Rajnikant B. Patel, Kwok-Shun Cheng
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Patent number: 7534287Abstract: The present invention is directed to porous composite materials comprised of a porous base material and a powdered nanoparticle material. The porous base material has the powdered nanoparticle material penetrating a portion of the porous base material; the powdered nanoparticle material within the porous base material may be sintered or interbonded by interfusion to form a porous sintered nanoparticle material within the pores and or on the surfaces of the porous base material. Preferably this porous composite material comprises nanometer sized pores throughout the sintered nanoparticle material. The present invention is also directed to methods of making such composite materials and using them for high surface area catalysts, sensors, in packed bed contaminant removal devices, and as contamination removal membranes for fluids.Type: GrantFiled: December 10, 2007Date of Patent: May 19, 2009Assignee: Entegris, Inc.Inventors: Robert Zeller, Christopher Vroman
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Patent number: 7520984Abstract: A filtration module (10) is provided which includes a manifold (12), a filter cartridge (16) and a bowl (14) which houses the filter cartridge (16). The filter cartridge (16) and bowl (14) are connected to each other by a key (30) which is secured to flat surfaces (38) on the cartridge (16) to form a unitary construction. The filter cartridge (16) and a bowl (14) are in fluid communication with the manifold (12) in a manner which prevents mixing of a fluid feed to the module (10) and a permeate removed from the module (10).Type: GrantFiled: June 27, 2006Date of Patent: April 21, 2009Assignee: Entegris, Inc.Inventor: David Stockbower
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Patent number: 7462283Abstract: The present invention teaches, that the removal of particles of any charge from liquid stream is possible by mechanisms other than sieving with good flow and low pressure drop. The use of a weakly charged or neutral surface on the one or more filters within a pre-selected pH range is used. Consequently, particles that are much smaller than the filter pore size are captured with high efficiency. The essentially neutral or weakly charged material filter surface in the filtration liquid may be formed through the proper selection of filter material or a surface modification of the base filters(s) to create the essentially neutral or weakly charged surface.Type: GrantFiled: December 5, 2005Date of Patent: December 9, 2008Assignee: Entegris, Inc.Inventors: Wayne Kelly, Donald Grant, Philip Goddard, Volkmar Thom
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Patent number: 7407708Abstract: A chemically resistant, extractable free, composite laminar film including polyimide, PFA and m-PTFE layers.Type: GrantFiled: September 18, 2002Date of Patent: August 5, 2008Assignee: Entegris, Inc.Inventors: Mutsuhiro Amari, Yukio Hashimoto, Tsutomu Ogawa
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Patent number: 7404493Abstract: The present invention provides a filter that can minimize the amount of residual liquid within the housing or container with a simplified construction. The article includes a cylinder portion having a cylindrical internal space with both ends open, a cylindrically formed pleated filter 5 inserted in the internal space of the cylinder portion 3 in contact with the inner wall of the cylinder portion 3 and having upper and lower edges liquid-tightly sealed. A perforate inner core 7 supports the inner surface of the pleated filter 5, lower and upper end caps 9, 11 are liquid-tightly bonded to the respective ends of the cylinder portion 3. A liquid distribution passage 21 communicates with gaps between the pleats of the pleated filter 5 from the lower portion of the cylinder portion 3. A liquid feed inlet 15 communicates with the liquid distribution passage 21 formed between the periphery of the pleated filter and a tapered inner wall surface 8 of the cylinder portion 3.Type: GrantFiled: March 23, 2005Date of Patent: July 29, 2008Assignee: Entegris, Inc.Inventor: Fumio Nozaki
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Patent number: 7389689Abstract: The present invention include non-porous adherent coatings of chemically inert high purity poly-oligomers deposited on substrates. The coatings are applied and cured on the substrates at relatively low temperatures which permits the coating process to be performed with temperature sensitive structures such as magnets, electronic circuits, electrodes, and bonding pads in place on the substrate. Coated substrates, such as sensors and fluid conduits, have an effective thickness of the protective non-porous coating that is chemically bonded to a surface of the substrate that will be contacted with a fluid. The adherent non-porous coating on the substrate protect it from corrosion, particle generation, swelling, or delamination caused by contact with the fluid.Type: GrantFiled: February 22, 2005Date of Patent: June 24, 2008Assignee: Entegris, Inc.Inventors: Christopher J. Wargo, Karl Niermeyer
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Patent number: 7387661Abstract: A contactor for effecting passage through a membrane from a first fluid a second fluid is provided. A cylindrical pleated membrane cartridge is positioned within a housing having a first inlet and a first outlet from a first fluid and at lest a second outlet for a second fluid. At least one baffle is positioned within a first flow path for the first fluid.Type: GrantFiled: April 22, 2004Date of Patent: June 17, 2008Assignee: Entegris, Inc.Inventors: Qunwei Wu, Craig L. Brodeur, Jieh-Hwa Shyu, Eric McNamara
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Patent number: 7329311Abstract: The present invention is directed to porous composite materials comprised of a porous base material and a powdered nanoparticle material. The porous base material has the powdered nanoparticle material penetrating a portion of the porous base material; the powdered nanoparticle material within the porous base material may be sintered or interbonded by interfusion to form a porous sintered nanoparticle material within the pores and or on the surfaces of the porous base material. Preferably this porous composite material comprises nanometer sized pores throughout the sintered nanoparticle material. The present invention is also directed to methods of making such composite materials and using them for high surface area catalysts, sensors, in packed bed contaminant removal devices, and as contamination removal membranes for fluids.Type: GrantFiled: August 10, 2006Date of Patent: February 12, 2008Assignee: Entegris, In.Inventors: Robert Zeller, Christopher Vroman
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Patent number: 7316728Abstract: The present invention is directed to an apparatus for combining a component from a fluid composition with a reactive fluid. The apparatus includes a hollow fiber contactor (142) having a plurality of hollow fibers contained within a housing. A reactive fluid (224), which may be on the shell or lumen side of the hollow fiber membrane, is included in the apparatus and is used for combining with a component from a fluid composition which is on the opposite side of the membrane from the reactive liquid. The reactive liquid combines with one or more components from the fluid composition and can be used for purification of the fluid composition or for the preparation of chemical reagents.Type: GrantFiled: May 27, 2003Date of Patent: January 8, 2008Assignee: Entegris, Inc.Inventors: Bipin Parekh, Saksatha Ly, Jieh-Hwa Shyu, John E. Pillion
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Patent number: 7297255Abstract: A mass transfer or energy transfer module is provided which includes a manifold, a cartridge and a bowl which houses the cartridge. The cartridge and bowl are connected to each other at least two flanges which fit into slots of the bowl to form a unitary construction.Type: GrantFiled: July 12, 2004Date of Patent: November 20, 2007Assignee: Entegris, Inc.Inventor: David Stockbower
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Patent number: 7249628Abstract: This invention relates to an apparatus for conditioning the temperature of a fluid by utilizing a thermoplastic heat exchanger (50) comprised of a plurality of hollow tubes. The apparatus controls the temperature of a process fluid inside the heat exchanger (50) via a controller (46) by adjustment of a control valve (64) that regulates the flow of an exchange fluid. The apparatus can be used to maintain the temperature of a chemical bath (12) and also to prepare discreet dispensed volumes of temperature controlled liquid.Type: GrantFiled: September 26, 2002Date of Patent: July 31, 2007Assignee: Entegris, Inc.Inventors: John E. Pillion, Jieh-Hwa Shyu, Alicia Briggs LaForge, Robert McLoughlin
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Patent number: 7247245Abstract: A depth filter design is disclosed which has little if any open void area upstream of the media. Preferably, it also has little if any open void area downstream of the media as well. A preferred embodiment uses layers of stacked, fibrous media with several of the layers being separated from the others by spacers which serve to compress the media and to prevent the bypass of fluid around the media adjacent the inner wall of the housing. Several designs for attaching the end caps which allow for the compression of the media are also disclosed.Type: GrantFiled: December 2, 1999Date of Patent: July 24, 2007Assignee: Entegris, Inc.Inventors: Stephen Proulx, George Perivolotis, Zhenwu Lin, Gregory Straeffer, George A. Gagne, Kenneth King, Ralph J. Stankowski
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Patent number: 7169302Abstract: A filtration module (10) is provided which includes a manifold (12), a filter cartridge (16) and a bowl (14) which houses the filter cartridge (16). The filter cartridge (16) and bowl (14) are connected to each other by a flange (15) on an end cap (30) of the filter cartridge (16) which fits into collar (34) on the bowl to form a unitary construction. The filter cartridge (16) and bowl (14) are in fluid communication with the manifold (12) in a manner which prevents mixing of a fluid feed to the module (10) and a permeate removed from the module (10).Type: GrantFiled: February 11, 2003Date of Patent: January 30, 2007Assignee: Entegris, Inc.Inventor: David Stockbower
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Patent number: 7153425Abstract: The present invention comprises a process for filtering a slurry and a filter cartridge construction for filtering a slurry having a filtration medium formed of a depth filter such as a cylindrical seamless fibrous depth filter comprising a nonwoven fibrous mass, woven fibers, a plurality of nonwoven fibrous layers or a fibrous felt or the like or a wound depth filter retained within a housing substantially free of an open void volume upstream of the depth filter which causes separation of solid particles from a slurry being filtered The filtration medium is divided into a plurality of depth filter segments by spacers which are spaced apart from each other along the length of a filter cartridge housing which houses the depth filter, The spacers serve to divide the depth filter medium into depth filter segments and to allow fluid to pass there through along a defined path defined by the configuration of the open portions of the spacers.Type: GrantFiled: August 13, 2004Date of Patent: December 26, 2006Assignee: Entegris, Inc.Inventors: Ralph Stankowski, Stephen G. Hunt