Patents Represented by Law Firm John Lezdey & Associate
  • Photoresist stripping composition
    Patent number: 5863346
    Abstract: A non-aqueous negative photoresist stripping composition which consists essentially of about 40 to 80% by weight of an alkylnaphthalene solvent, about 5 to 20% by weight of an alkyl phenol which provides a corrosion inhibitory effect, about 5 to 20% by weight of a linear monoalkylbenzene sulfonic acid which is a surfactant and about 1 to 10% by weight of a dialkylbenzene sulfonic acid. There is further provided a process for removing coatings from a photoresist with the compositions of the invention.
    Type: Grant
    Filed: February 24, 1998
    Date of Patent: January 26, 1999
    Assignee: Ashland Inc.
    Inventor: Frnacis W. Michelotti