Patents Represented by Attorney John P. Halimer
  • Patent number: 6133670
    Abstract: A compact electrostatic comb actuator is disclosed for microelectromechanical (MEM) applications. The actuator is based upon a plurality of meshed electrostatic combs, some of which are stationary and others of which are moveable. One or more restoring springs are fabricated within an outline of the electrostatic combs (i.e. superposed with the moveable electrostatic combs) to considerably reduce the space required for the actuator. Additionally, a truss structure is provided to support the moveable electrostatic combs and prevent bending or distortion of these combs due to unbalanced electrostatic forces or external loading. The truss structure formed about the moveable electrostatic combs allows the spacing between the interdigitated fingers of the combs to be reduced to about one micron or less, thereby substantially increasing the number of active fingers which can be provided in a given area.
    Type: Grant
    Filed: June 24, 1999
    Date of Patent: October 17, 2000
    Assignee: Sandia Corporation
    Inventors: M. Steven Rodgers, Michael S. Burg, Brian D. Jensen, Samuel L. Miller, Stephen M. Barnes