Abstract: Formation of solid-water detoxifying reagents for chemical and biological agents. Solutions of detoxifying reagent for chemical and biological agents are coated using small quantities of hydrophobic nanoparticles by vigorous agitation or by aerosolization of the solution in the presence of the hydrophobic nanoparticles to form a solid powder. For example, when hydrophobic fumed silica particles are shaken in the presence of IN oxone solution in approximately a 95:5-weight ratio, a dry powder results. The hydrophobic silica forms a porous coating of insoluble fine particles around the solution. Since the chemical or biological agent tends to be hydrophobic on contact with the weakly encapsulated detoxifying solution, the porous coating breaks down and the detoxifying reagent is delivered directly to the chemical or biological agent for maximum concentration at the point of need.
Type:
Grant
Filed:
February 26, 2002
Date of Patent:
April 18, 2006
Assignee:
The Regents of the University of California
Abstract: A method for fabricating an EUV phase shift mask is provided that includes a substrate upon which is deposited a thin film multilayer coating that has a complex-valued reflectance. An absorber layer or a buffer layer is attached onto the thin film multilayer, and the thickness of the thin film multilayer coating is altered to introduce a direct modulation in the complex-valued reflectance to produce phase shifting features.
Type:
Grant
Filed:
September 27, 2002
Date of Patent:
April 4, 2006
Assignee:
EUV Limited Liability Corporation
Inventors:
Daniel G. Stearns, Donald W. Sweeney, Paul B. Mirkarimi, Anton Barty
Abstract: A method of preparing energetic metal-oxide-based energetic materials using sol-gel chemistry has been invented. The wet chemical sol-gel processing provides an improvement in both safety and performance. Essentially, a metal-oxide oxidizer skeletal structure is prepared from hydrolyzable metals (metal salts or metal alkoxides) with fuel added to the sol prior to gelation or synthesized within the porosity metal-oxide gel matrix. With metal salt precursors a proton scavenger is used to destabilize the sol and induce gelation. With metal alkoxide precursors standard well-known sol-gel hydrolysis and condensation reactions are used. Drying is done by standard sol-gel practices, either by a slow evaporation of the liquid residing within the pores to produce a high density solid nanocomposite, or by supercritical extraction to produce a lower density, high porous nanocomposite.
Type:
Grant
Filed:
April 24, 2003
Date of Patent:
January 17, 2006
Assignee:
The Regents of the University of California
Inventors:
Thomas M. Tillotson, Randall L. Simpson, Lawrence W. Hrubesh
Abstract: A device is described that can be used by surgeons to provide quick and accurate face-lifting maneuvers that minimize the amount of tissue that has to be removed. The device is comprised of a shaft with a relatively planar but possibly lenticulate and even slightly curved tip that can divide and energize various tissue planes causing contraction especially via the fibrous tissues. Various forms of energy can be delivered down the shaft to heat and cause desirable tissue contraction. The device can also include a temperature sensor that can be used to control power output.
Type:
Grant
Filed:
December 22, 2000
Date of Patent:
December 13, 2005
Assignee:
Pearl Technology Holdings, LLC
Inventors:
Paul J. Weber, Luiz B. Da Silva, Alexander M. Rubenchik
Abstract: By tapering the diameter of a flanged barrel laser rod over its length, the maximum trapped path length of a barrel mode can be dramatically reduced, thereby reducing the ability of the trapped spontaneous emission to negatively impact laser performance through amplified spontaneous emission (ASE). Laser rods with polished barrels and flanged end caps have found increasing application in diode array end-pumped laser systems. The polished barrel of the rod serves to confine diode array pump light within the rod. In systems utilizing an end-pumping geometry and such polished barrel laser rods, the pump light that is introduced into one or both ends of the laser rod, is ducted down the length of the rod via the total internal reflections (TIRs) that occur when the light strikes the rod's barrel. A disadvantage of using polished barrel laser rods is that such rods are very susceptible to barrel mode paths that can trap spontaneous emission over long path lengths.
Type:
Grant
Filed:
August 29, 2000
Date of Patent:
August 30, 2005
Assignee:
The Regents of the University of California
Inventors:
Raymond J. Beach, Eric C. Honea, Stephen A. Payne, Ian Mercer, Michael D. Perry
Abstract: A series of unique biochemical tests are combined to enable unskilled law enforcement and private investigation personnel to rapidly perform sex crime investigations on skin swipes and body fluid residues deposited on specific articles of clothing. The invention also allows spouses to privately identify and monitor infidelity activities of their mate through the application of this test kit to personal clothing and other areas where body fluids may be found.
Abstract: To measure a convex mirror, a reference beam and a measurement beam are both provided through a single optical fiber. A positive auxiliary lens is placed in the system to give a converging wavefront onto the convex mirror under test. A measurement is taken that includes the aberrations of the convex mirror as well as the errors due to two transmissions through the positive auxiliary lens. A second measurement provides the information to eliminate this error. A negative lens can also be measured in a similar way. Again, there are two measurement set-ups. A reference beam is provided from a first optical fiber and a measurement beam is provided from a second optical fiber. A positive auxiliary lens is placed in the system to provide a converging wavefront from the reference beam onto the negative lens under test. The measurement beam is combined with the reference wavefront and is analyzed by standard methods.
Type:
Grant
Filed:
January 23, 2004
Date of Patent:
June 21, 2005
Assignee:
The Regents of the University of California
Abstract: Systems are described that disperse the wavelength bands corresponding to the channel centers at a faster rate than the bandwidth of the channels themselves. An embodiment consists of a double element system including a grating, to create the initial separation, and a segmented mirror with multiple flat facets of different tilt, which reflect each spatially separated channel at a different angle. The size, position and angle of the facets are designed to match the spacing and position of individual channels of known wavelength and number that are diffracting from a grating with a predefined period, a set distance from this device. This system enables the individual channels to be re-imaged at some later point with a large separation between the channels, relative to their spatial size.
Type:
Grant
Filed:
July 16, 2002
Date of Patent:
June 21, 2005
Assignee:
General Atomics
Inventors:
Ian Michael Barton, Steve Mathew Herman
Abstract: A motor/generator has its stationary portion, i.e., the stator, positioned concentrically within its rotatable element, i.e., the rotor, along the axis of rotation of the rotor. The rotor includes a Halbach array of magnets. The voltage and power outputs are regulated by varying the radial gap in between the stator windings and the rotating Halbach array. The gap is varied by extensible and retractable supports attached to the stator windings that can move the windings in a radial direction.
Type:
Grant
Filed:
September 5, 2001
Date of Patent:
June 14, 2005
Assignee:
The Regents of the University of California
Abstract: A reversible license plate frame is provided that will prevent theft of a license plate and the registration sticker. The reversible locking license plate and registration sticker tag protection frame of the present invention includes a license plate frame comprising a heavy material frame that surrounds unbreakable windows that protect the registration tags regardless of which of the four corners of the license plate to which the tag may be affixed. This prevents the removal of the registration tags by unauthorized persons. To prevent theft, a locking bar configured to receive a cylinder lock covers the screws that attach the frame to the license plate mount. The cylinder locks cannot be removed without a key rendering the screws inaccessible.
Abstract: A method is disclosed for the implementation of phase shifting masks for EUV lithography. The method involves directly etching material away from the multilayer coating of the mask, to cause a refractive phase shift in the mask. By etching into the multilayer (for example, by reactive ion etching), rather than depositing extra material on the top of the multilayer, there will be minimal absorption loss associated with the phase shift.
Abstract: The chemical composition of thin films is modulated during their growth. A computer code has been developed to design specific processes for producing a desired chemical composition for various deposition geometries. Good agreement between theoretical and experimental results was achieved.
Abstract: The figure of a substrate is very precisely measured and a figured-correcting layer is provided on the substrate. The thickness of the figure-correcting layer is locally measured and compared to the first measurement. The local measurement of the figure-correcting layer is accomplished through a variety of methods, including interferometry and fluorescence or ultrasound measurements. Adjustments in the thickness of the figure-correcting layer are made until the top of the figure-correcting layer matches a desired figure specification.
Abstract: Figure errors are corrected on optical or other precision surfaces by changing the local density of material in a zone at or near the surface. Optical surface height is correlated with the localized density of the material within the same region. A change in the height of the optical surface can then be caused by a change in the localized density of the material at or near the surface.
Type:
Grant
Filed:
March 1, 2002
Date of Patent:
January 18, 2005
Assignee:
EUV Limited Liability Corporation
Inventors:
John S. Taylor, James A. Folta, Claude Montcalm
Abstract: A method and apparatus are described wherein a thin layer of complaint material is deposited on the surface of a chuck to mitigate the deformation that an entrapped particle might cause in the part, such as a mask or a wafer, that is clamped to the chuck. The harder particle will embed into the softer layer as the clamping pressure is applied. The material composing the thin layer could be a metal or a polymer for vacuum or electrostatic chucks. It may be deposited in various patterns to affect an interrupted surface, such as that of a “pin” chuck, thereby reducing the probability of entrapping a particle.
Type:
Grant
Filed:
January 7, 2003
Date of Patent:
December 28, 2004
Assignee:
EUV LLC
Inventors:
Kenneth L. Blaedel, Paul A. Spence, Samuel L. Thompson
Abstract: The average power output of a laser is scaled, to first order, by increasing the transverse dimension of the gain medium while increasing the thickness of an index matched light guide proportionately. Strategic facets cut at the edges of the laminated gain medium provide a method by which the pump light introduced through edges of the composite structure is trapped and passes through the gain medium repeatedly. Spontaneous emission escapes the laser volume via these facets. A multi-faceted disk geometry with grooves cut into the thickness of the gain medium is optimized to passively reject spontaneous emission generated within the laser material, which would otherwise be trapped and amplified within the high index composite disk. Such geometry allows the useful size of the laser aperture to be increased, enabling the average laser output power to be scaled.
Type:
Grant
Filed:
January 26, 2001
Date of Patent:
December 21, 2004
Assignee:
The Regents of the University of California
Abstract: Optically pumped rare-earth-doped polarizing fibers exhibit significantly higher gain for one linear polarization state than for the orthogonal state. Such a fiber can be used to construct a single-polarization fiber laser, amplifier, or amplified-spontaneous-emission (ASE) source without the need for additional optical components to obtain stable, linearly polarized operation.
Abstract: A method is provided for repairing defects in a multilayer coating layered onto a reticle blank used in an extreme ultraviolet lithography (EUVL) system. Using high lateral spatial resolution, energy is deposited in the multilayer coating in the vicinity of the defect. This can be accomplished using a focused electron beam, focused ion beam or a focused electromagnetic radiation. The absorbed energy will cause a structural modification of the film, producing a localized change in the film thickness. The change in film thickness can be controlled with sub-nanometer accuracy by adjusting the energy dose. The lateral spatial resolution of the thickness modification is controlled by the localization of the energy deposition. The film thickness is adjusted locally to correct the perturbation of the reflected field. For example, when the structural modification is a localized film contraction, the repair of a defect consists of flattening a mound or spreading out the sides of a depression.
Type:
Grant
Filed:
September 26, 2000
Date of Patent:
November 23, 2004
Assignee:
The EUV LLC
Inventors:
Daniel G. Stearns, Donald W. Sweeney, Paul B. Mirkarimi
Abstract: Nanochannel electrophoretic and electrochemical devices having selectively-etched nanolaminates located in the fluid transport channel. The normally flat surfaces of the nanolaminate having exposed conductive (metal) stripes are selectively-etched to form trenches and baffles. The modifications of the prior utilized flat exposed surfaces increase the amount of exposed metal to facilitate electrochemical redox reaction or control the exposure of the metal surfaces to analytes of large size. These etched areas variously increase the sensitivity of electrochemical detection devices to low concentrations of analyte, improve the plug flow characteristic of the channel, and allow additional discrimination of the colloidal particles during cyclic voltammetry.
Type:
Grant
Filed:
September 30, 2002
Date of Patent:
November 16, 2004
Assignee:
The Regents of the University of California
Inventors:
Michael P. Surh, William D. Wilson, Troy W. Barbee, Jr., Stephen M. Lane
Abstract: A method for compensating for flare-induced critical dimensions (CD) changes in photolithography. Changes in the flare level results in undesirable CD changes. The method when used in extreme ultraviolet (EUV) lithography essentially eliminates the unwanted CD changes. The method is based on the recognition that the intrinsic level of flare for an EUV camera (the flare level for an isolated sub-resolution opaque dot in a bright field mask) is essentially constant over the image field. The method involves calculating the flare and its variation over the area of a patterned mask that will be imaged and then using mask biasing to largely eliminate the CD variations that the flare and its variations would otherwise cause. This method would be difficult to apply to optical or DUV lithography since the intrinsic flare for those lithographies is not constant over the image field.
Type:
Grant
Filed:
September 26, 2000
Date of Patent:
November 9, 2004
Assignee:
EUV LLC
Inventors:
John E. Bjorkholm, Daniel G. Stearns, Eric M. Gullikson, Daniel A. Tichenor, Scott D. Hector