Abstract: An automated defect inspection system has been invented and is used on patterned wafers, whole wafers, broken wafers, partial wafers, sawn wafers such as on film frames, JEDEC trays, Auer boats, die in gel or waffle packs, MCMs, etc. and is specifically intended and designed for second optical wafer inspection, for such defects as metalization defects (such as scratches, voids, corrosion, and bridging), diffusion defects, passivation layer defects, scribing defects, glassivation defects, chips and cracks from sawing, solder bump defects, and bond pad area defects.
April 29, 2000
Date of Patent:
November 30, 2004
August Technology Corp.
Jeffrey O'Dell, Thomas Verburgt, Mark Harless, Cory Watkins
Abstract: A confocal three dimensional inspection system, and process for use thereof, allows for inspecting of bumps and other three dimensional (3D) features on wafers and other semiconductor substrates. The sensor eliminates out of focus light using a confocal principal to improve depth response. This process and system creates multiple parallel confocal optical paths along a line. The out of focus light is eliminated by placing an aperture at a plane which is a conjugate focal plane to the surface of the sample. The result is that the sensor produces a signal only when the sample surface is in a narrow focal range.
Abstract: A raft inflation valve includes a one-piece valve body which is connected to a pressure vessel and which has an inlet communicating with the pressure vessel, a recess for receiving a cartridge having a puncture disc, and a passage which connects the inlet and the recess and which is covered by the puncture disc. The cartridge includes a disc retainer holding the puncture disc in position to block the passage in the valve body, and a bayonet having a cuffing edge which is biased by a spring toward the puncture disc but prohibited from such motion by a ball/link pin held in place by the pull cable ball until the cable is pulled. Once the cable has been pulled to remove the ball, the bayonet is driven by the bias force toward the disc to clearly cut and puncture the disc and permit flow of gas from the pressure vessel through the inlet passage through the disc to the outlet passage in the outlet of the valve.