Abstract: This method for securing a cartridge mechanical face seal to a sleeve in a rotating shaft sealing assembly uses one or more plunger locks to secure the rotary face of the seal assembly to the sleeve. Such seal assemblies have been previously secured with set screws. This plunger lock method for securing the rotary face of the cartridge seal avoids the use of set screws altogether. Instead, one or more spring activated plunger locks located in the rotary face seal assembly are mated into precisely located receptacle bores in the sleeve. The resulting attachment will not leak, require additional tightening, or distort the sleeve.

Abstract: This process for the installation of semiconductor fabrication tools includes designing standard modules for connecting the sources of the process gases and liquids t so that, for each gas and liquid, the sources of each required gas and liquid only need to be connected to the standard module once instead of multiple connections to the fabrication tool and support equipment. The modules can be installed before the delivery of the tool so that connection to the site sources of gases and liquids can be accomplished with fewer connections and in much shorter time.