Abstract: Silicon germanium (SiGe) is epitaxially grown on a silicon channel above nFET and pFET regions of a substrate. SiGe is removed above the nFET regions. A device includes a silicon channel above the nFET regions and a SiGe channel above the pFET regions.
Type:
Grant
Filed:
March 30, 2009
Date of Patent:
November 8, 2011
Assignee:
International Business Machines Corporation
Inventors:
Daniel J. Jaeger, Michael V. Aquilino, Christopher V. Baiocco