Patents Represented by Attorney, Agent or Law Firm Joshua D. Isenberg
-
Patent number: 6583031Abstract: A microelectromechanical systems (MEMS) element, MEMS optical switch and MEMS fabrication method are described. The MEMS element comprises a crystalline and moveable element is moveably attached to the substrate. The moveable element includes a perpendicular portion oriented substantially perpendicular to a plane of the substrate. The crystal structure of the perpendicular portion and substrate are substantially similar. The moveable element moveable is moveably attached to the substrate for motion substantially constrained to a plane oriented substantially perpendicular to a plane of the substrate. In at least one position, a part of a perpendicular portion of the moveable element projects beyond a surface of the substrate. The moveable element may be retained in place by a latch. The perpendicular portion may be formed substantially perpendicular portion to the substrate. An array of such structures can be implemented to work as an optical switch.Type: GrantFiled: July 25, 2001Date of Patent: June 24, 2003Assignee: Onix Microsystems, Inc.Inventor: Chuang-Chia Lin
-
Patent number: 6569765Abstract: A hybrid deposition system includes a reactor chamber, at least one heating unit, a first reagent gas source, a metallo-organic source, a second reagent gas source, and a valve unit for stopping flow of gas from the metallo-organic source. The hybrid incorporates features of both metal-organic chemical vapor deposition (MOCVD) and hydride vapor-phase epitaxy (HVPE). The hybrid system may be operated in MOCVD mode, in HVPE mode, or in both MOCVD and HVPE mode simultaneously. The system may be switched between deposition modes without interrupting deposition, or removing the sample from the reactor chamber. The at least one heating unit may be moved relative to the reactor chamber, or vice versa, for easily and rapidly adjusting the temperature of the reactor chamber. A method for forming at least one epitaxial layer of a III-V compound on a non-native substrate in which deposition is performed by two different techniques in the same reactor chamber.Type: GrantFiled: August 26, 1999Date of Patent: May 27, 2003Assignee: CBL Technologies, IncInventors: Glenn S. Solomon, David J. Miller
-
Patent number: 6566256Abstract: A method for forming an epitaxial layer involves depositing a buffer layer on a substrate by a first deposition process, followed by deposition of an epitaxial layer by a second deposition process. By using such a dual process, the first and second deposition processes can be optimized, with respect to performance, growth rate, and cost, for different materials of each layer. A semiconductor heterostructure prepared by a dual deposition process includes a buffer layer formed on a substrate by MOCVD, and an epitaxial layer formed on the buffer layer, the epitaxial layer deposited by hydride vapor-phase deposition.Type: GrantFiled: April 16, 1999Date of Patent: May 20, 2003Assignees: GBL Technologies, Inc., Matsushita Electric Industrial Co., LtdInventors: Glenn S. Solomon, David J. Miller, Tetsuzo Ueda
-
Patent number: 6514781Abstract: A method and apparatus for maintaining the state of a MEMS device in the event of a power failure are disclosed. The apparatus and method may be used with a MEMS device generally having one or more MEMS elements moveably coupled to a substrate that uses electrostatic clamping force to sustain the state of the MEMS element. According to the method, a capacitive or other charge-storing circuit is coupled between a clamping surface and an electrical ground. During normal operation, a clamping voltage is applied between the clamping surface and at least one MEMS element to retain the at least one MEMS element against the clamping surface. In the event of a power failure, the source of the clamping voltage and other circuit paths to ground are isolated from the clamping surface. The charge-storing circuit maintains an electric charge on the clamping surface.Type: GrantFiled: July 7, 2001Date of Patent: February 4, 2003Assignee: Onix Microsystems, Inc.Inventors: Mark W. Chang, Scott D. Dalton, Michael J. Daneman, Timothy Beerling, Stephen F. Panyko, Gary M. Zalewski
-
Patent number: 6498113Abstract: A method for the production of crack-free Group III-Nitride layers is disclosed. The method proceeds by growing a crack-free first layer of Group III-Nitride on a starting substrate. A partial to complete loss of coherency is then achieved between a lattice of the first layer and a lattice of the starting substrate. A second layer is grown to form a composite layer that includes the first layer and the second layer such that the first layer is between the second layer and the substrate. The starting substrate may then be completely separated from the composite layer to produce the freestanding crack-free Group III-Nitride layer.Type: GrantFiled: June 4, 2001Date of Patent: December 24, 2002Assignee: CBL Technologies, Inc.Inventors: Glenn S. Solomon, David J. Miller
-
Patent number: 6480319Abstract: A beam steering module and switching system. The steering module is composed of a N×M array of single axis mirrors able to rotate about a particular axis (X-axis), a second N×M array of single axis mirrors able to rotate about an axis orthogonal to that of the first N×M array of mirrors (Y-axis), and a relay lens designed to image the first mirror array onto the second mirror array such that the beam angle may be controlled in both the X and Y-axis by adjusting the angle of the appropriate mirrors in the X and Y mirror arrays. Two steering modules may be combined to form a switching system. With two such steering modules, it is possible to completely determine, at the plane of the output fiber array, the position and angle of an optical beam emerging from any of the input fibers.Type: GrantFiled: July 28, 2001Date of Patent: November 12, 2002Assignee: Onix Microsystems, Inc.Inventors: Michael J. Daneman, Behrang Behin, Satinderpall S. Pannu
-
Patent number: 6473544Abstract: An optical crossbar switch having refractive or reflective components for equalizing beam spreading and diffraction in all the connections. The optical fibers or waveguides coupled to the switch are not staggered, but are parallel as in a conventional fiber array. The refractive component is disposed between the switch and the input optical fibers. Preferably, a similar refractive component is disposed between the output optical fibers and the switch. The refractive component can be a stairstep block made of glass, silicon or silica. Light from each input fiber travels through a well-defined thickness of the stairstep block. Since the block has a refractive index greater than the surrounding atmosphere, the wavelength in reduced within the block, and beam spreading and diffraction are reduced.Type: GrantFiled: March 3, 2000Date of Patent: October 29, 2002Assignee: Onix Microsystems, Inc.Inventors: Michael Daneman, Behrang Behin, Meng-Hsiung Kiang, Kam Yin Lau
-
Patent number: 6449407Abstract: An optical switch module having a movable mirror disposed between two fixed mirrors. All three mirrors are aligned parallel to each other in a linear array to form a crossbar switch. The movable mirror moves between a first position and a second position to selectively couple optical signals between two inputs and two outputs. The basic switch module may be scaled up to form an apparatus that incorporates N movable mirrors and N+1 fixed mirrors, where N is an integer greater than zero. Such an apparatus can accommodate 2N fiber inputs and 2N fiber outputs, e.g., in an optical add/drop multiplexer (OADM). The parallel configuration of the switch module takes advantage of existing lens array and fiber V-groove technology to facilitate integration of the fibers and collimators in the module, thereby reducing the difficulty and cost associated with alignment, assembly, and packaging.Type: GrantFiled: March 3, 2000Date of Patent: September 10, 2002Assignee: Orix Microsystems, Inc.Inventors: Meng-Hsiung Kiang, Behrang Behin, Michael Daneman, Kam Yin Lau
-
Patent number: 6437902Abstract: A beam steering module and switching system. The steering module is composed of a N×M array of single axis mirrors able to rotate about a particular axis (X-axis), a second N×M array of single axis mirrors able to rotate about an axis orthogonal to that of the first N×M array of mirrors (Y-axis), and a relay lens designed to image the first mirror array onto the second mirror array such that the beam angle may be controlled in both the X and Y-axis by adjusting the angle of the appropriate mirrors in the X and Y mirror arrays. Two steering modules may be combined to form a switching system. With two such steering modules, it is possible to completely determine, at the plane of the output fiber array, the position and angle of an optical beam emerging from any of the input fibers.Type: GrantFiled: July 28, 2001Date of Patent: August 20, 2002Assignee: Onix MicrosystemsInventors: Michael J. Daneman, Behrang Behin, Satinderpall S. Pannu
-
Patent number: 6427907Abstract: A single-piece side-loading box includes a top, a bottom, a plurality of wall portions, and a side-opening panel in one unitary piece. The unitary piece is foldable from an unformed configuration to a box configuration with the side-opening panel openable in the box configuration to permit access to an interior of the box. The plurality of wall panels are connected between the top and the bottom in the box configuration. At least some of the wall panels in the box configuration overlap to form one or more multi-panel walls. The box includes a releasable fastening mechanism for fastening the side-opening panel in the closed position. The releasable fastening mechanism may be part of the unitary piece. The releasable fastening mechanism may include mechanical couplers, latching tabs, magnetic members, Velcro strips, or the like. The side-opening panel may be transparent or include a transparent portion attached to an opaque frame. The transparent panel may include a decorative pattern.Type: GrantFiled: August 29, 2000Date of Patent: August 6, 2002Assignee: R. R. Foreman and CompanyInventors: Alfred D. Espinoza, Robert R. Foreman, Emily M. Okasaki
-
Patent number: 6375365Abstract: For any optically interconnected assembly, the packaging tasks include alignment of one or multiple optical devices, and attachment of aligned modules to a common substrate. The concept disclosed here is a packaging method to assemble pre-aligned optical modules on a common structure called motherboard. The apparatus consists of two components: device carrier or motherboard with openings on the sides and adjustable plugs in the form of pins or balls. The method and apparatus utilize plugs as connection bridges between device carriers and motherboard, allowing solid contacts and a rigid aligned structure among modules. The direct benefits include relaxation of dimensional tolerances on parts and elimination of the need for high-precision spacers.Type: GrantFiled: February 28, 2000Date of Patent: April 23, 2002Assignee: Onix Microsystems, Inc.Inventor: Kelvin Chau
-
Patent number: 6355107Abstract: A reaction assembly of a vapor-phase deposition system includes a reaction chamber leading to a gullet outlet, and a sheath leading to a sheath outlet. The gullet outlet and the sheath outlet at the distal end of the reaction assembly, the distal end including a compound nozzle. The reaction assembly generates a compound gas stream for projection from the compound nozzle towards a target substrate. The compound gas stream includes a reagent gas stream and a sheath gas stream, wherein the sheath gas stream at least partially envelopes the reagent gas stream. Methods for generating and delivering a compound gas stream, and for performing vapor-phase deposition, are also disclosed.Type: GrantFiled: September 29, 2000Date of Patent: March 12, 2002Assignees: CBL Technologies, Inc., Matsushita Electric Industrial Co., Ltd.Inventors: Glenn S. Solomon, David J. Miller, Tetsuzo Ueda
-
Patent number: 6330102Abstract: A beam steering module and switching system. The steering module is composed of a N×M array of single axis mirrors able to rotate about a particular axis (X-axis), a second N×M array of single axis mirrors able to rotate about an axis orthogonal to that of the first N×M array of mirrors (Y-axis), and a relay lens designed to image the first mirror array onto the second mirror array such that the beam angle may be controlled in both the X and Y-axis by adjusting the angle of the appropriate mirrors in the X and Y mirror arrays. Two steering modules may be combined to form a switching system. With two such steering modules, it is possible to completely determine, at the plane of the output fiber array, the position and angle of an optical beam emerging from any of the input fibers.Type: GrantFiled: March 25, 2000Date of Patent: December 11, 2001Assignee: Onix MicrosystemsInventors: Michael J. Daneman, Behrang Behin, Satinderpall Pannu
-
Patent number: 6290774Abstract: A method for forming a relatively thick epitaxial film of a III-V compound on a non-native substrate involves sequentially forming a plurality of epitaxial layers on the substrate at a growth temperature. By cooling the substrate and each sequentially grown epitaxial layer to a sub-growth temperature prior to resumption of epitaxial growth, stress within the sample (due to thermal mismatch between the substrate and the epitaxial layer) is periodically relieved. Sequential epitaxial growth is combined with system etching to provide an epitaxial layer which not only has a lower propensity to shatter, but also exhibits improved surface morphology. Sequential hydride vapor-phase epitaxy using HCl as both source gas and etchant, allows integration of sequential deposition and system etching into a single process.Type: GrantFiled: May 7, 1999Date of Patent: September 18, 2001Assignees: CBL Technology, Inc., Matsushita Electric Industrial Co., Ltd.Inventors: Glenn S. Solomon, David J. Miller, Tetsuzo Ueda
-
Patent number: 6234385Abstract: A single-piece side-loading box having triple side-wall construction and a unique latching tab. The box incorporates walls, a floor, a top, a side-opening panel and latching tab in one unitary piece. The one piece box generally includes a bottom panel, front, side and back panels attached to the bottom panel and a lid attached to the back panel. A latching tab with integral handle is incorporated into the front panel. The box is preferably assembled from a cutout made from a single piece of material. The side-walls, side wings and side reinforcements fold into each other to provide a triple-side-wall construction that allows the box to support a great weight.Type: GrantFiled: September 3, 1999Date of Patent: May 22, 2001Assignee: R.R. Foreman and CompanyInventors: Alfred D. Espinoza, Robert R. Foreman, Emily M. Okasaki