Abstract: Simple, environmentally friendly developers and strippers are disclosed for free radical-initiated, addition polymerizable resists, cationically cured resists and solder masks and Vacrel photoresists. In all cases both the developers and the strippers include gamma butyrolactone, propylene carbonate and benzyl alcohol, optionally also including a minor amount of methanol, ethanol, isopropyl alcohol, propylene glycol monomethylacetate, ethylene glycol monomethyl ether, formamide, nitromethane, propylene oxide, or methyl ethyl ketone, acetone and water.
Type:
Grant
Filed:
October 22, 1991
Date of Patent:
December 7, 1993
Assignee:
International Business Machines Corporation
Inventors:
Nageshwer R. Bantu, Anilkumar C. Bhatt, Ashwinkumar C. Bhatt, Joseph A. Kotylo, Gerald W. Jones, Robert J. Owen, Kostas Papathomas, Anaya K. Vardya
Abstract: A silicon modified organic surface is roughened by treatment with an oxygen containing plasma. If necessary the organic surface may be silicon-modified by treatment with a silicon containing material prior to plasma treatment. The roughened organic surface provides improved adhesion to other organic surfaces and to deposited metals. Improvements in methods for laminating organic surfaces and for depositing metals on organic surfaces which achieve improved adhesion are disclosed. Structures comprising laminated organic layers or metal deposited on organic surfaces which provide improved adhesion between the organic layers or between the metal and the organic-surface are also disclosed.
Type:
Grant
Filed:
May 16, 1991
Date of Patent:
May 4, 1993
Assignee:
International Business Machines Corporation