Abstract: Methods for semiconductor device fabrication are provided. Features are created using spacers. Methods include creating a pattern comprised of at least two first features on the substrate surface, depositing a first conformal layer on the at least two first features, depositing a second conformal layer on the first conformal layer, partially removing the second conformal layer to partially expose the first conformal layer, and partially removing the first conformal layer from between the first features and the second conformal layer thereby creating at least two second features. Optionally the first conformal film is partially etched back before the second conformal film is deposited.

Abstract: Described is a method and apparatus for forming interconnects with a metal-metal oxide electromigration barrier and etch-stop. In one embodiment of the invention, the method includes depositing a metal layer on the top of a planarized interconnect layer, the interconnect layer having an interlayer dielectric (ILD) with a top that is planar with the top of an electrically conductive interconnect. In one embodiment of the invention, the method includes reacting the metal layer with the ILD to form a metal oxide layer on the top of the ILD. At the same time, the metal layer will not be significantly oxidized by the electrically conductive interconnect, thus forming a metal barrier on the electrically conductive interconnect to improve electromigration performance. The metal barrier and metal oxide layer together comprise a protective layer. A second ILD may be subsequently formed on the protective layer, and the protective layer may act an etch-stop during a subsequent etch of the second ILD.

Abstract: Embodiments of the invention provide devices and methods for extracting nucleic acid molecules from solution using electric fields. The structures and methods of embodiments of the invention are suited to incorporation into micro and nano fluidic devices, such as lab-on-a-chip devices and micro total analysis systems.

Abstract: An embodiment of the invention relates to a device comprising (1) an array of electromagnetic elements comprising coils, metal cores, and metal core heads, and (2) a controller that is adapted to control a current for one or more coils individually, to vary the current for said one or more coils individually, to reverse the current for one or more coils individually, and to generate a specific magnetic flux distribution and gradient across two or more coils; wherein the metal core head is at one end of the coil and the metal core head has a geometry to create a desired magnetic flux, intensity and gradient, in a region of interest between two adjacent coils; further wherein the device is functionally coupled to a fluidic device to concentrate and transport magnetic particles in a fluid without fluidic movement of the fluid.

Abstract: Embodiments of the invention provide methods for detecting molecular recognition events electronically and optically. Methods according to embodiments of the invention provide a nucleic acid molecule that hybridizes to a first probe nucleic acid molecule attached to an electronic detector wherein the second nucleic acid molecule comprises two regions. The two regions of the second nucleic acid molecule consist of a region that is complementary to the probe nucleic acid and a distal region that is not complementary to the first probe nucleic acid molecule. The hybridization reaction is detected electronically. A third nucleic acid molecule having an attached optically detectable label is hybridized to the distal region of the second nucleic acid molecule and the label is detected optically. Methods according to embodiments of the invention are useful, for example, to validate and quantify electronic detection methods.

Abstract: Embodiments of the invention provide devices and methods for extracting nucleic acid molecules from solution using electric fields. The structures and methods of embodiments of the invention are suited to incorporation into micro and nano fluidic devices, such as lab-on-a-chip devices and micro total analysis systems.

Abstract: Embodiments of the present invention provide EUV (extreme ultraviolet) photoresists comprising photonic crystals, as well as other components. Photonic crystals in general provide the ability not only to block light transmission, but also to create resonant pockets in which light can propagate. The photonic crystals are based on bio-related polymers that are capable of self-assembly into crystalline form.

Abstract: Modified and functionalized metallic nanoclusters capable of providing an enhanced Raman signal from an organic Raman-active molecule incorporated therein are provided. For example, modifications include coatings and layers, such as adsorption layers, metal coatings, silica coatings, and organic layers. The nanoclusters are generally referred to as COINs (composite organic inorganic nanoparticles) and are capable of acting as sensitive reporters for analyte detection. A metal that enhances the Raman signal from the organic Raman-active compound is inherent in the nanocluster. A variety of organic Raman-active compounds and mixtures of compounds can be incorporated into the nanocluster.

Abstract: Embodiments of the present invention provide methods for the fabrication of carbon nanotubes using composite metal films. A composite metal film is fabricated to provide uniform catalytic sites to facilitate the uniform growth of carbon nanotubes. Further embodiments provide embedded nanoparticles for carbon nanotube fabrication. Embodiments of the invention are capable of maintaining the integrity of the catalytic sites at temperatures used in carbon nanotube fabrication processes, 600 to 1100° C.

Abstract: Methods for fabricating dense arrays of polymeric molecules in a highly multiplexed manner are provided using semiconductor-processing-derived lithographic methods. Advantageously, the methods are adaptable to the synthesis of a variety of polymeric compounds. For example, arrays of branched peptides and polymers joined by peptide bonds may be fabricated in a highly multiplexed manner. Additionally, peptides that adopt helical structures are synthesized on a substrate surface and arrays are created having one or more features containing peptides capable of forming helixes.

Abstract: Modified and functionalized metallic nanoclusters capable of providing an enhanced Raman signal from an organic Raman-active molecule incorporated therein are provided. For example, modifications include coatings and layers, such as adsorption layers, metal coatings, silica coatings, and organic layers. The nanoclusters are generally referred to as COINs (composite organic inorganic nanoparticles) and are capable of acting as sensitive reporters for analyte detection. A metal that enhances the Raman signal from the organic Raman-active compound is inherent in the nanocluster. A variety of organic Raman-active compounds and mixtures of compounds can be incorporated into the nanocluster.

Abstract: Embodiments of the present invention provide a miniaturized spectroscopy system comprising a light source fabricated from porous silicon. Porous silicon light emitting devices can provide tunable, narrow, and directional luminescence. Advantageously, a porous silicon light source can be integrated into a silicon wafer based device thus simplifying the manufacture of a miniaturized spectros copy system and lab-on-a-chip type devices employing spectroscopic detection.

Abstract: Disclosed herein are a Raman spectroscopy structure comprising a porous material substrate, and a method of performing Raman spectroscopy of a sample disposed adjacent to the structure comprising the porous material substrate. Generally, the substrate includes one or more layers of a porous material such as porous silicon, porous polysilicon, porous ceramics, porous silica, porous alumina, porous silicon-germanium, porous germanium, porous gallium arsenide, porous gallium phosphide, porous zinc oxide, and porous silicon carbide. It has been discovered that such a substrate material, when excited with near-infrared light, does not exhibit undesired background fluorescence characteristic of other known Raman spectroscopy substrates.

Abstract: Briefly, in accordance with one embodiment of the invention, the intensity of the signals from surface enhanced Raman spectroscopy may be increased by using lithium chloride as an enhancer to activate a metallic structure used for surface enhanced Raman spectroscopy. The increased signal intensity may allow surface enhanced Raman spectroscopy to be utilized to detect individual analytes such as nucleotides, for example in DNA sequencing without requiring a dye or radioactive label.