Patents Represented by Attorney Keating & Bennett, Ltd.
  • Patent number: 7002437
    Abstract: A piezoelectric thin-film resonator includes a supporting substrate. A piezoelectric thin-film is formed on the supporting substrate. A lower electrode and an upper electrode are formed with the piezoelectric thin-film therebetween. The stiffness of at least one of the lower and upper electrodes is higher than that of the piezoelectric thin-film.
    Type: Grant
    Filed: June 6, 2003
    Date of Patent: February 21, 2006
    Assignee: Murata Manufacturing Co., Ltd.
    Inventors: Masaki Takeuchi, Hajime Yamada, Hideki Kawamura, Daisuke Nakamura, Yukio Yoshino