Abstract: A plasma display apparatus and a method of driving the same are disclosed. The plasma display apparatus includes a plasma display panel including first electrodes, second electrodes, and third electrodes, a first driver, a second driver, and a reference separation controller. The first driver supplies sustain signals each including a positive polarity sustain signal and a negative polarity sustain signal to the first electrodes during a sustain period, and supplies a ground level voltage during at least one time interval between the positive polarity sustain signals and the negative polarity sustain signals. The reference separation controller connects or separates a first reference voltage source commonly connected to the first driver and the second electrodes to or from a second reference voltage source connected to the second driver.
Abstract: A plasma processing apparatus for generating plasma in a chamber maintained in a vacuum state and processing a substrate using the plasma. The plasma processing apparatus includes a refrigerant channel for circulating a refrigerant formed in a shower head, thereby easily controlling the temperature of the shower head and improving the reproducibility of plasma treatment.
Type:
Grant
Filed:
December 20, 2005
Date of Patent:
February 15, 2011
Assignee:
Advanced Display Process Engineering Co. Ltd.
Inventors:
Young Jong Lee, Jun Young Choi, Saeng Hyun Jo, Young-Joo Hwang, Jong-Cheon Kim