Patents Represented by Attorney KED & Assoicates, LLP

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  • Plasma processing apparatus
    Patent number: 7886687
    Abstract: A plasma processing apparatus for generating plasma in a chamber maintained in a vacuum state and processing a substrate using the plasma. The plasma processing apparatus includes a refrigerant channel for circulating a refrigerant formed in a shower head, thereby easily controlling the temperature of the shower head and improving the reproducibility of plasma treatment.
    Type: Grant
    Filed: December 20, 2005
    Date of Patent: February 15, 2011
    Assignee: Advanced Display Process Engineering Co. Ltd.
    Inventors: Young Jong Lee, Jun Young Choi, Saeng Hyun Jo, Young-Joo Hwang, Jong-Cheon Kim