Abstract: A semiconductor device having a barrier film comprising an extremely thin film formed of one or more monolayers each comprised of a two-dimensional array of metal atoms. In one exemplary aspect, the barrier film is used for preventing the diffusion of atoms of another material, such as a copper conductor, into a substrate, such as a semiconducting material or an insulating material. In one mode of making the semiconductor device, the barrier film is formed by depositing a precursor, such as a metal halide (e.g., BaF2), onto the substrate material, and then annealing the resulting film on the substrate material to remove all of the constituents of the temporary heteroepitaxial film except for a monolayer of metal atoms left behind as attached to the surface of the substrate. A conductor, such as copper, deposited onto the barrier film is effectively prevented from diffusing into the substrate material even when the barrier film is only one or several monolayers in thickness.
Type:
Grant
Filed:
August 20, 1998
Date of Patent:
April 13, 2004
Assignee:
The United States of America as represented by the Secretary
of the Navy
Inventors:
Michael F. Stumborg, Francisco Santiago, Tak Kin Chu, Kevin A. Boulais
Abstract: An epitaxial barrier material provides not only a unique growth medium for growing single crystal structures of elemental metal thereon, but also provides an effective diffusion barrier at extremely thin thicknesses against migration of atoms from the metallization layer into an adjacent semiconductor substrate or low dielectric insulation layer. This invention is particularly advantageous for forming single crystal, transition metal conductor lines, contacts, filled trenches, and/or via plugs, and especially conductor structures based on transition metals of copper, silver, gold, or platinum. These metals are highly attractive for interconnect strategies on account of there respective low resistivity and high reliability characteristics. Processes for making the barrier film in a semiconductor device are also covered.
Type:
Grant
Filed:
May 3, 2000
Date of Patent:
October 15, 2002
Assignee:
The United States of America as represented by the Secretary
of the Navy
Inventors:
Tak Kin Chu, Francisco Santiago, Kevin A. Boulais
Abstract: A semiconductor device having a barrier film comprising an extremely thin film formed of one or more monolayers each comprised of a two-dimensional array of metal atoms. In one exemplary aspect, the barrier film is used for preventing the diffusion of atoms of another material, such as a copper conductor, into a substrate, such as a semiconducting material or an insulating material. In one mode of making the semiconductor device, the barrier film is formed by depositing a precursor, such as a metal halide (e.g., BaF2), onto the substrate material, and then annealing the resulting film on the substrate material to remove all of the constituents of the temporary heteroepitaxial film except for a monolayer of metal atoms left behind as attached to the surface of the substrate. A conductor, such as copper, deposited onto the barrier film is effectively prevented from diffusing into the substrate material even when the barrier film is only one or several monolayers in thickness.
Type:
Grant
Filed:
August 20, 1998
Date of Patent:
February 26, 2002
Assignee:
The United States of America as represented by the Secretary
of the Navy
Inventors:
Michael F. Stumborg, Francisco Santiago, Tak Kin Chu, Kevin A. Boulais
Abstract: A stereoscopic image viewing device which can be used to create the effect of a stereoscopic image from back to back stereoscopically complementary views of an image, is disclosed. Also disclosed is a portable device for providing a stereoscopic image from a card which contains complementary stereoscopic views of an image in a manner whereby the images can be arranged substantially back to back. In addition, a novel card containing two stereoscopically complementary images, is disclosed. This card, when used in combination with the stereoscopic image viewing device, creates the effect of a stereoscopic image.
Abstract: A piezoelectric electro-acoustic device for converting an electric signal into an acoustic vibration and/or for converting acoustic vibrations into an electric signal is disclosed. The device employs at least two opposing concave membranes having a single axis of elongation tangent to the curvature thereof. The membranes face each other and are connected to electrodes. Upon changes in electric current provided to the membranes, the membranes will vibrate towards one another to thereby displace air located between the surfaces thereof. This dipole horn structure provides a high conversion efficiency as well as a true 360.degree. acoustic response.
Abstract: A game timing apparatus and method for simultaneously timing events for two players is disclosed. The method involves presetting a pair of clocks for respective initial time periods, starting one of the clocks to time a first player's move, simultaneously stopping one clock and starting the other, and incrementing or decrementing each of the clocks by a time interval once for each move or a group of moves. The apparatus includes a pair of clock means, a pair of start switches for starting and stopping the clock means, and a compensation means for incrementing or decrementing each clock means by a time interval.