Abstract: A hydraulic drive and fluid control system for a mechanism having at least two fluid actuated cylinder includes a bi-directional motor/gear pump. A monolithic block manifold has intersecting bores formed therein in which valving and control mechanism for the fluid circuit is mounted. The fluid control system includes a variety of elements for providing smooth action of the cylinders at start, stop, and intermediate operations. These include piston-style accumulators, self-actuating fluid flow rate control valves and cushion valves.

Abstract: Methods are disclosed for correcting proximity effects as affected by varying magnitudes of beam blur occurring at different respective locations in an image of a reticle subfield as projected onto the sensitive surface of a substrate. Local resizings of pattern-element profiles as defined on the reticle are made taking into consideration not only proximity effects arising from Coulomb interactions but also different magnitudes of beam blur occurring at different respective locations in a projected subfield. Beam blur is imparted by the projection-optical system and is a function of the magnitude of beam deflection, the location of pattern element(s) within the area of the exposed subfield, and the exposure-energy profile on the surface of the substrate being exposed. A resist-development energy threshold is established such that the edges of pattern elements as transferred to the wafer in response to the exposure-energy profile will be at their desired locations according to design specifications.