Abstract: A composition of matter has the formula: where n is an integer equal or greater than 1. The composition of matter possesses characteristic absorbance behavior with respect to infrared and visible energy, which is used to detect and determine the concentration of TCE. In another aspect, a method for generating the composition comprises reacting trichloroethylene (TCE) with poly(ethylenimine) in accordance with the formula: where n is an integer equal or greater than 1. Also, the invention sets forth a sensor to detect trichloroethylene (TCE) in materials. The sensor includes the composition of material that can absorb at least one of infrared (IR) or ultraviolet (UV) or visible (VIS) energies when formed by the reaction of trichloroethylene (TCE) with poly(ethylenimine).

Abstract: A semiconductor processing component includes a quartz body characterized by silicon oxide filled micro cracks. The component is utilized as a processing component in a semiconductor furnace system. The quartz body is prepared by cleaning the component to remove a build up silicon layer and to expose micro cracks in the surface of the component and to etch the micro cracks into trenches. A silicon layer is applied onto the processing component body and at least a portion of the silicon is oxidized to silica to fill the trenches in the surface of the component body.