Patents Represented by Attorney Knobbe Martens Olson & Beal LLP

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  • MEMS device fabricated on a pre-patterned substrate
    Patent number: 8285089
    Abstract: A microelectromechanical systems device fabricated on a pre-patterned substrate having grooves formed therein. A lower electrode is deposited over the substrate and separated from an orthogonal upper electrode by a cavity. The upper electrode is configured to be movable to modulate light. A semi-reflective layer and a transparent material are formed over the movable upper electrode.
    Type: Grant
    Filed: February 9, 2012
    Date of Patent: October 9, 2012
    Assignee: Qualcomm MEMS Technologies, Inc.
    Inventor: Clarence Chui