Patents Represented by Law Firm Kolisch Hartwell Dickinson McCormack & Heauser
  • Patent number: 5820950
    Abstract: An optical pellicle and package are disclosed. The optical pellicle includes a pellicle membrane and a pellicle frame with a cover side, a membrane side and an outer edge. The pellicle membrane is mounted and covers a substantial portion of the membrane side of the pellicle frame. The membrane side of the pellicle frame includes a peripheral region that extends beyond the pellicle membrane. In one embodiment of the invention, the peripheral region includes a relieved portion at the periphery of the membrane side of the pellicle frame. Another embodiment includes one of the previously described optical pellicles and a package. The package includes a first piece and a second piece. The first piece includes a structure for supporting an optical pellicle. The structure is configured to support the optical pellicle so that the pellicle membrane is free from contact with the first piece of the package.
    Type: Grant
    Filed: October 30, 1996
    Date of Patent: October 13, 1998
    Assignee: Micro Lithography, Inc.
    Inventor: Ching-Bore Wang