Abstract: In pattern generating apparatus of the type employing a reciprocating laser beam for scanning a substrate surface, three scan lines are formed simultaneously. During reciprocation in one direction, the beam is deflected upwardly at an angle of arccot (1/3) with respect to the reciprocating direction, and during reciprocation in the opposite direction, the beam is deflected downwardly at an angle of arccot (1/3).
Type:
Grant
Filed:
February 6, 1975
Date of Patent:
March 9, 1976
Assignee:
Bell Telephone Laboratories, Incorporated