Abstract: A single point bonding tool for use in ultrasonically bonding a fine or ultrafine wire to another electrical conductor, has a thin film resistor integrally formed thereon. The thin film resistor is integrally formed on the bonding tip by standard photolithographic techniques applied to the bonding tool. The tool combines ultrasonic energy and thermal energy provided by the resistor to provide required bonding energy that may be localized both in space and in time. The result offers optimized energy transfer to the selected workpieces and minimizes risk of damage to adjacent, heat sensitive devices.
Type:
Grant
Filed:
May 15, 1992
Date of Patent:
August 31, 1993
Assignee:
International Business Machines Corporation
Inventors:
Robert E. Fontana, Jr., Linda H. Lane, Celia E. Yeack-Scranton