Abstract: A method for removing surface oxide from polysilicon includes depositing a very thin layer of germanium (e.g. monolayers in thickness) over the polysilicon immediately before a subsequent polysilicon deposition step, and then heating the germanium-coated polysilicon in a vacuum to sublime (remove) volatile germanium oxide. This method is applied to formation of a trench capacitor, which uses either doped amorphous silicon or doped amorphous SiGe material in the formation of the electrodes.
Type:
Grant
Filed:
April 19, 2001
Date of Patent:
August 20, 2002
Assignee:
International Business Machines Corporation
Inventors:
Kwong H. Wong, Ashima B. Chakravarti, Satya N. Chakravarti, Subramanian S. Iyer
Abstract: An apparatus for retrieving information in a computer network system having at least one network server device and a user device. The user device and said network server having established a successful network session so that they are in processing communication with one another. At first a target page is displayed on a screen or monitor connected to the user device. The target page including a number of first level link references for selection by any user where each first level link reference further includes subsequent level link references. An on-screen search option menu will then be provided to allow any user to search all reference links provided by the target page and all subsequent pages, and to identify only specific references according to the menu selection made. Some of the menu selection provided according to different embodiments of the present invention are media searches, FTP file searches, HREF searches and usernet/newsgroup searches.
Type:
Grant
Filed:
May 13, 1998
Date of Patent:
May 23, 2000
Assignee:
International Business Machines Corporation