Abstract: The imaging system provides assistance during the positioning of a measuring tip as it is placed onto a contact region of a microchip, in order to measure an on-chip signal. The contact region is imaged in a magnified fashion. An insertion device is provided that is suitable for providing a display of the on-chip signal in the imaging plane.
Type:
Grant
Filed:
May 28, 2002
Date of Patent:
January 11, 2005
Assignee:
Infineon Technologies AG
Inventors:
Stefan Dietrich, Manfred Dobler, Thilo Marx, Peter Mayer