Abstract: Pitch multiplication is performed using a two step process to deposit spacer material on mandrels. The precursors of the first step react minimally with the mandrels, forming a barrier layer against chemical reactions for the deposition process of the second step, which uses precursors more reactive with the mandrels. Where the mandrels are formed of amorphous carbon and the spacer material is silicon oxide, the silicon oxide is first deposited by a plasma enhanced deposition process and then by a thermal chemical vapor deposition process. Oxygen gas and plasma-enhanced tetraethylorthosilicate (TEOS) are used as reactants in the plasma enhanced process, while ozone and TEOS are used as reactants in the thermal chemical vapor deposition process. The oxygen gas is less reactive with the amorphous carbon than ozone, thereby minimizing deformation of the mandrels caused by oxidation of the amorphous carbon.
Type:
Grant
Filed:
March 4, 2008
Date of Patent:
February 28, 2012
Assignee:
Round Rock Research, LLC
Inventors:
Jingyi Bai, Gurtej S Sandhu, Shuang Meng
Abstract: An information processing device includes: a correction coefficient holding unit configured to hold a correction coefficient which is a ratio between the position of a control target at a start time of control operation, and a detection signal indicating the control result of the control target; an initial-value-compensation matrix holding unit configured to hold an initial-value-compensation matrix for performing compensation of the initial value of a control computing unit for computing control output for controlling the control target from the detection signal based on the position and speed of the control target; and an initial-value generating unit configured to correct the position and speed of the control target at a start time of control operation with the correction coefficient, and employ the position and speed of the control target after correction, and the initial-value-compensation matrix to generate an initial-value-compensation value for compensating the initial value of the control computing u
Abstract: Methods and apparatus are provided that gather a patient's body tissue and then secure the gathered tissue in a reduced area utilizing a securing structure. The securing structure mainly resides on one side of the tissue to minimize or eliminate both foreign material and the amount of manipulation or activity on the other side of the tissue. The securing device is matched to the desired amount of tissue manipulation to minimize the structure. The gathered and secured tissue can surround a septal defect to obstruct or close the defect itself.
Type:
Grant
Filed:
September 17, 2004
Date of Patent:
February 14, 2012
Assignee:
St. Jude Medical, Inc.
Inventors:
Michael P. Brenzel, Paul J. Hindrichs, Theodore P. Dale, Todd A. Krinke, Steven D. Kruse, David M. Costello, Todd A. Berg, John A. Roop
Abstract: A cross-point semiconductor memory device includes: a plurality of first wirings extending in a first direction; a plurality of second wirings positioned on a layer different from the first wirings to extend in a second direction different from the first direction; and memory parts provided in overlap areas of the first wirings and the second wirings, wherein the odd-numbered first wirings and the even-numbered first wirings are arranged on different insulating interlayers in an up-down direction.
Abstract: A folding seat comprising a base and a back hinged thereto, in which the base comprises an open topped container defining an inner storage space, in which in a first arrangement the back is folded onto the base, and a closed container is formed, and in which in a second arrangement the back is unfolded from the base and a seating or lying platform is formed.
Abstract: Apparatus is disclosed for the safety monitoring of a dialyzer including at least one holder for holding a container for a powdered substance in which the holder includes a supply end for supplying a liquid to the container and a delivery end for delivering liquid containing the powdered substance from the container to a concentrate pump. The apparatus includes a first supply conduit for supplying water to the supply end of the holder for delivery to the container, a first delivery conduit for delivering the water containing the powdered substance from the delivery end of the holder to the concentrate pump, and a second supply conduit which is connectable to either the delivery end of the holder or to the first delivery conduit. Methods for the safety monitoring of dialyzers are also disclosed.
Type:
Grant
Filed:
June 28, 2000
Date of Patent:
August 6, 2002
Assignee:
Gambro AB
Inventors:
Anders Rosenqvist, Erik Linderup, Björn Ericson