Patents Represented by Attorney, Agent or Law Firm Leydig, Voit& Mayer, L
  • Micro-mirror device
    Patent number: 6259548
    Abstract: A micro-mirror device includes a mirror forming substrate on which a mirror is disposed. A pair of torsion beams are disposed on opposing sides of the mirror forming substrate. An anchor projects from a supporting substrate, supporting the ends of the torsion beams. A driving frame surrounds at least one side of the torsion beams and is connected to the mirror forming substrate through a link beam. A drive force generator drives the driving frame.
    Type: Grant
    Filed: September 23, 1999
    Date of Patent: July 10, 2001
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Masahiro Tsugai, Nobuaki Konno, Hiroyuki Fujita, Makoto Mita, Hiroshi Toshiyoshi, Yoshio Mita