Abstract: Embodiments of the present invention provide a memory array of dual part cells and design structure thereof. The memory array has a pair of twisted write bit lines and a pair of twisted read bit lines for each column. The twist is made by alternating the vertical position of each bit line pair in each section of a column, with the result of generating common mode nose and of reducing differential mode noise.
Type:
Grant
Filed:
October 19, 2007
Date of Patent:
February 8, 2011
Assignee:
International Business Machines Corporation
Abstract: A stepper is combined with hardware that deposits a layer of material in the course of forming an integrated circuit, thus performing the deposition, patterning and cleaning without exposing the wafer to a transfer between tools and combining the function of three tools in a composite tool. The pattern-defining material is removed by the application of UV light through the mask of the stepper, thereby eliminating the bake and development steps of the prior art method. Similarly, a flood exposure of UV eliminates the cleaning steps of the prior art method.
Type:
Grant
Filed:
December 1, 2005
Date of Patent:
January 18, 2011
Assignee:
International Business Machines Corporation
Inventors:
Michael P. Chudzik, Joseph F. Shepard, Jr.