Abstract: A method is disclosed for singulating die from a substrate having a sacrificial layer and one or more device layers, with a retainer being formed in the device layer(s) and anchored to the substrate. Deep Reactive Ion Etching (DRIE) etching of a trench through the substrate from the bottom side defines a shape for each die. A handle wafer is then attached to the bottom side of the substrate, and the sacrificial layer is etched to singulate the die and to form a frame from the retainer and the substrate. The frame and handle wafer, which retain the singulated die in place, can be attached together with a clamp or a clip and to form a package for the singulated die. One or more stops can be formed from the device layer(s) to limit a sliding motion of the singulated die.

Abstract: A polarization-sensitive infrared image sensor (also termed a snapshot polarimeter) utilizing a 2-D array of polarizers to filter infrared light from a scene according to polarization, and a 2-D array of photodetectors (i.e. a focal plane array) to detect the filtered infrared light and generate polarization information which can be used to form a polarization-sensitive image of the scene. By forming each polarizer on an optical fiber in a fiber optic faceplate, the polarizers can be located facing a 2-D array of retarders to minimize diffraction effects of the infrared light. The optical fibers also guide the filtered infrared light to the photodetectors to reduce cross-talk in the polarization information. The polarizers can be formed as wire grid polarizers; and the retarders can be formed as subwavelength surface-relief gratings.

Abstract: A method for producing a pattern in an aerogel disposed as a coating on a substrate comprises exposing the aerogel coating to the vapors of a hydrophobic silane compound, masking the aerogel coating with a shadow photomask and irradiating the aerogel coating with ultraviolet (UV) irradiation. The exposure to UV through the shadow mask creates a pattern of hydrophobic and hydrophilic regions in the aerogel coating. Etching away the hydrophilic regions of the aerogel coating, preferably with a 1 molar solution of sodium hydroxide, leaves the unwetted and unetched hydrophobic regions of the aerogel layer on the substrate, replicating the pattern of the photomask. The hydrophobic aerogel pattern can be further exposed to UV irradiation if desired, to create a hydrophilic aerogel pattern.

Abstract: A method for producing ceramic articles with multiple distinct regions of density by blending pore formers of different types or amounts with ceramic particles to create multiple pore former/ceramic particle mixtures. The mixtures are placed in a divided die cavity, divider removed and subjected to compaction under pressure to produce a compacted billet. The compacted billet is thermally processed to volatilize organics from the billet and sinter the billet, creating a cohesive billet of ceramic having two or more regions of density.

Abstract: An atomic magnetometer is disclosed which uses a pump light beam at a D1 or D2 transition of an alkali metal vapor to magnetically polarize the vapor in a heated cell, and a probe light beam at a different D2 or D1 transition to sense the magnetic field via a polarization rotation of the probe light beam. The pump and probe light beams are both directed along substantially the same optical path through an optical waveplate and through the heated cell to an optical filter which blocks the pump light beam while transmitting the probe light beam to one or more photodetectors which generate electrical signals to sense the magnetic field. The optical waveplate functions as a quarter waveplate to circularly polarize the pump light beam, and as a half waveplate to maintain the probe light beam linearly polarized.

Abstract: A microelectromechanical (MEM) inertial sensor is disclosed which can be used to sense a linear acceleration, or a Coriolis acceleration due to an angular rotation rate, or both. The MEM inertial sensor has a proof mass which is supported on a bridge extending across an opening through a substrate, with the proof mass being balanced on the bridge by a pivot, or suspended from the bridge by the pivot. The proof mass can be oscillated in a tangential direction in the plane of the substrate, with any out-of-plane movement of the proof mass in response to a sensed acceleration being optically detected using transmission gratings located about an outer edge of the proof mass to generate a diffracted light pattern which changes with the out-of-plane movement of the proof mass.