Patents Represented by Attorney M. S. Adler
  • Patent number: 4569897
    Abstract: This invention relates to negative photoresist compositions containing thermally stable polyglutarimide polymers dissolved in suitable solvents. The negative resists are useful for producing high resolution images on surfaces by exposing the resist to a wide range of exposing radiation wavelengths and by subsequently developing the unexposed resist with an organic solvent or an aqueous base developer. The polyglutarimide polymers can be formulated so that they are partially soluble in an aqueous base, compatible with aqueous base soluble photosensitizers, and developable in aqueous base solutions, thereby eliminating the need for the use of any organic solvent.
    Type: Grant
    Filed: January 16, 1984
    Date of Patent: February 11, 1986
    Assignee: Rohm and Haas Company
    Inventor: Palaiyur S. Kalyanaraman