Abstract: Disclosed is an accelerometer for measuring seismic data. The accelerometer includes a proof mass that is resiliently coupled to a support structure by folded beams, S-shaped balanced beams, straight beams, and/or folded beams with resonance damping. The support structure further includes travel stops for limiting transverse motion of the proof mass.
Type:
Grant
Filed:
June 21, 2001
Date of Patent:
October 19, 2004
Assignee:
Input/Output, Inc.
Inventors:
Arjun Selvakumar, Duli Yu, Lianzhong Yu, Ben W. Jones