Patents Represented by Attorney, Agent or Law Firm Mark V. Sooloy
  • Abrasive with a modified surface and a method for making it
    Patent number: 6746498
    Abstract: A composition is described that comprises an abrasive, and a hydrocarbon containing component that is coupled to the abrasive. Such a composition may be included in a slurry that is used to polish a substrate, when forming a semiconductor device. Also described is a method for modifying a surface of an abrasive that comprises coupling a hydrocarbon containing component to the surface of the abrasive.
    Type: Grant
    Filed: December 12, 2002
    Date of Patent: June 8, 2004
    Assignee: Intel Corporation
    Inventor: Mark F. Buehler