Abstract: A method for using an organic dielectric as a sacrificial layer for forming suspended or otherwise spaced structures. The use of an organic dielectric has a number of advantages, including allowing use of an organic solvent or etch to remove the sacrificial layer. Organic solvents only remove organic materials, and thus do not affect or otherwise damage non-organic layers such as metal layers. This may reduce or eliminate the need for the rinsing and drying steps often associated with the use of acidic etchants such as Hydrofluoric Acid.

Abstract: A differential pressure sensor for sensing changes in pressure at a desired location, which sensor includes a sensing portion and a reference portion to produce an output indicative of the difference therebetween, both the sensing portion and the reference portion being open to the pressure around the sensor until the sensor is located in the desired sensing location and then the reference portion is closed to capture the pressure then existing at the desired location and any pressure changes thereafter producing signals indicative of the pressure differences.