Patents Represented by Attorney, Agent or Law Firm Matthew D. Rabdan
  • Single crystal TFT from continuous transition metal delivery method
    Patent number: 6620661
    Abstract: A TFT fabricated from a single crystal grain, and fabrication method has been provided. A large crystal grain is made by precise control of annealment, transition metal concentration, the density of transition metal nucleation sites, and the distance between nucleation sites. In one aspect of the invention, a diffusion layer permits the continual delivery of transition metal at a rate that both supports the lateral growth of di-silicide, and large distances between nucleation sites.
    Type: Grant
    Filed: January 8, 2002
    Date of Patent: September 16, 2003
    Assignee: Sharp Laboratories of America, Inc.
    Inventors: Masashi Maekawa, Yukihiko Nakata