Abstract: An operational amplifier includes, between an input and an output of an operational amplifier (an operational amplification stage) 10, a feedback capacitor 34 connected in negative feedback, a phase control circuit 100 having a resistor element (a resistor unit) 30 connected in series to the feedback capacitor 34. Load capacitors (load units) 32 are connected on the output side of the operational amplifier 10 and driven by an output signal from the operational amplifier 10. In a case that the capacitance values of the load capacitor 32 and 33 are increased and the phase margin of the operational amplifier becomes excessive in comparison with the optimum value, a resistance value RO of the resistor element 30 is increased to control the phase margin of the operational amplifier so as to fall within the optimum range, and thus accelerated settling properties are realized.

Abstract: A method and apparatus is provided for imaging of topographic and material features of defects on the surface of a semiconductor wafer with simultaneous display of multiple SEM images generated by a single detector of backscattered and secondary electrons. A primary beam is directed at a specimen to release secondary electrons therefrom and to backscatter electrons of the particle beam therefrom, which electrons are detected by a single detector, while an imager produces and displays images responsive to the detector, and an electrode directs the path of the secondary electrons. A charge controller controls the charge placed on the electrode such that the imager produces a plurality of different images desired by the user, which are displayed substantially simultaneously by the imager.

Abstract: To achieve an LSI automated design satisfying a required function and a required performance with the reuse of existing design data, there are disposed: library element memory means for storing, in the form of elements, existing design data (circuit data) together with design procedures (conversion information) thereof; element arrangement entering means for entering an element arrangement for achieving the desired function; library element specializing means for determining the functions of general-purpose elements; element synthesizing means for synthesizing an element having one function in which the functions of the elements are combined with one another; design data memory means for storing a variety of data; conversion instruction entering means for entering a design target level; conversion method selecting means for selecting a method of converting the elements to the target level, based on information relating to the design procedure of each of the elements; and design data converting means for execu