Patents Represented by Attorney, Agent or Law Firm Michael A. Messina
  • SEM image enhancement using narrow band detection and color assignment
    Patent number: 6201240
    Abstract: Disclosed is a system and method for enhancing edge, topography, and materials in SEM images. The enhancements are achieved by collecting secondary electrons at narrow energy bands. This allows construction of various “primary” images having specific features enhanced. Further enhancement is achieved by various manipulations and combinations of the “primary” images to obtain a final enhanced image. Yet further enhancements are achieved by assigning color to various “primary” images before constructing the final image.
    Type: Grant
    Filed: November 4, 1998
    Date of Patent: March 13, 2001
    Assignee: Applied Materials, Inc.
    Inventors: Noam Dotan, Sergio Serulnik, Dubi Shachal